AVS 51st International Symposium
    Organic Films and Devices Wednesday Sessions
       Session OF+EM-WeM

Paper OF+EM-WeM8
A Soluble Photopatternable Pentacene Precursor for Use in Thin Film Transistors

Wednesday, November 17, 2004, 10:40 am, Room 304C

Session: Molecular and Organic Films and Devices - Electronics
Presenter: K.P. Weidkamp, University of Wisconsin-Madison
Authors: K.P. Weidkamp, University of Wisconsin-Madison
A. Afzali, IBM T.J. Watson Research Center
R.M. Tromp, IBM T.J. Watson Research Center
R.J. Hamers, University of Wisconsin-Madison
Correspondent: Click to Email
The practical application of pentacene as an organic semiconductor has been hampered by its lack of solubility in common solvents. Here we report the synthesis and characterization of a photopatternable, soluble pentacene precursor. This precursor, based on an N-sulfinylcarbamate adduct of pentacene, is converted back to pentacene at relatively low temperatures in the presence of acid catalyst and can be patterned by way of chemical amplification in the presence of photoacid generator. After UV illumination, a short, low-temperature post-exposure bake is used to convert the precursor to pentacene and the unexposed area is then washed away with solvent. A very short higher temperature anneal helps to form a crystalline film of pentacene that has mobilities in the range of 10@super -2@ cm@super 2@ V@super -1@ s@super -1@. Features can be patterned as small as 10 µm, small enough for use in many applications such as active matrix displays.