AVS 51st International Symposium
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP26
Site-selectivity of Chemical Reaction on a Biomimetic Super-hydrophobic/Super-hydrophilic Micropatterned Template

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: N. Saito, Nagoya University, Japan
Authors: N. Saito, Nagoya University, Japan
Y. Wu, Nagoya University, Japan
M. Kouno, Nagoya University, Japan
Y. Inoue, Nagoya University, Japan
O. Takai, Nagoya University, Japan
Correspondent: Click to Email
Recently, the materials fabrication based on biomimetics attract the attention of many researchers due to their green process, high function and novel self-organized structure. In nature, there are super water-repellent plant leaves such as lotus and taro. These surfaces are covered with hydrophobic micropapilla. The presence of hydrophilic group on such a structure leads to ultra water-repellency. Water droplets would be formed on only super-hydrophilic regions when water was spilled over an artificial super-hydrophobic/super-hydrophilic micropattern on substrates. In this study, we focused on the fabrication and application of biomimetic super-hydrophobic/super-hydrophilic micro-pattern using the microwave plasma-enhanced chemical vapor deposition (MPECVD) and vacuum ultra violet (VUV) lithography. Silicon wafer was used as substrates. Raw materials in the MPECVD were trimethylmethoxysilane (TMMOS) and Ar. The super-hydrophobic/super-hydrophilic pattern was fabricated by VUV irradiation thorough a TEM mesh. In order to confirm the pattern, surface water droplet was observed by environmental SEM. We successfully demonstrated site-selective electroless Cu plating on the pattern from the FE-SEM images.