AVS 51st International Symposium
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP2
Fabrication of High Performance NSOM Probe For Optical Trapping

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: M.S. Song, SunMoon University, Korea
Authors: S.S. Choi, SunMoon University, Korea
D.W. Kim, SunMoon University, Korea
C.K. Chun, SunMoon University, Korea
M.S. Song, SunMoon University, Korea
M.J. Park, Korean Military Academy, Korea
Correspondent: Click to Email
There have been tremendous interests about the optical trapping of the biomolecule in the microdevice with optical spectroscopic capablities. For microdevice application purposes, the optical trapping with nearfield optical probe array seems quite promising. Though, the weak nearfield intensity has been major obstacle for its application. The nearfield optical intensity through the nanosize aperture is dependent upon the aperture size, the grain size of the deposited metallic film, and other factors influencing the surface plasmon excitation. The surface plasmon excitation can be accomplished with periodic texturing of the metal surface around the nanoszie aperture. The enhancement of the nearfield optical intensity can be utilized for the nearfield optical trapping. In this report, the two adjacent metal aperture was fabricated using microfabrication technique including stress-dependent oxidation, isotropic wet etching of silicon oxide and bulk etching of Si, and bimetallic metal deposition. The adjacent nanosize metal aperture with distance less than the input wavelength can improve the output optical intensity. The bimetallic deposition of Ti/Al layer has been performed in order to provide better uniformity of the coated metal film. The buffer layer of Ti thin film would reduce grain size during the reflow process. The reduced grain size of the deposited thin film is supposed to improve throughput of nearfield optical intensity. The fabricated probe array will be utilized for near field optical trapping of the biomolecule. The optical characterization of the fabricated nearfield probe array will be investigated and the biomolecule trapping be tested.