AVS 51st International Symposium
    MEMS and NEMS Monday Sessions
       Session MN-MoP

Paper MN-MoP3
Enhancement of Piezoelectric Properties of Silver Doped Pb(Zr,Ti)O@sub3@-Pb(Mn,Wn,Sb,Nb)O@sub3@ Thin Films

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: H.W. Chung, Yonsei University, Korea
Authors: H.W. Chung, Yonsei University, Korea
S.H. Lim, Yonsei University, Korea
E.S. Lee, Yonsei University, Korea
S.Y. Lee, Yonsei university, Korea
Correspondent: Click to Email
The dielectric and piezoelectric properties of silver doped Pb(Zr,Ti)O@sub3@-Pb(Mn,W,Sb,Nb)O@sub3@ thin film deposited on a Pt/Ti/SiO@sub2@/Si substrate by pulsed laser deposition has been investigated depending on silver contents. By varying the contents of silver from 0 ~ 1 mol.%, the effect of silver doping on PZT-PMWSN thin film was systematically observed. No reaction between silver and PZT is observed in X-ray diffraction analysis. As increasing silver contents, it is observed that the relative dielectric constant increased because of effective electric field in the dielectric phase.