AVS 51st International Symposium
    MEMS and NEMS Monday Sessions
       Session MN-MoA

Paper MN-MoA8
Layered Nanofabrication (lnf) As a Tool for NEMS and Bio-NEMS

Monday, November 15, 2004, 4:20 pm, Room 213C

Session: Micro and Nano Fabrication Techniques for MEMS and NEMS
Presenter: B.E. Koel, University of Southern California
Authors: B.E. Koel, University of Southern California
A.A.G. Requicha, University of Southern California
M.E. Thompson, University of Southern California
Correspondent: Click to Email
We have proposed a new rapid prototyping technique at the nanoscale, called Layered Nanofabrication (LNF)@footnote 1@. A nanometer-sized, three-dimensional (3-D) object can be build by successive fabrication of layers in which nanoparticles are first deposited and then manipulated by using atomic force microscopy (AFM). Each layer is then planarized by adding a molecular sacrificial layer whose top surface serves as a support for the next processing step. The sacrificial layers, or conversely the nanoparticles, are removed in a final step. Achieving suitable planarization for LNF requires extreme constraints on the approach used for this process. We have focused thus far on pushing the efficiency and control in deposition of films from self-assembled monolayers (SAMS). Improvements in permanently bonding or linking nanoscale components are also required. Our progress to date will be reviewed, including discussion of various siloxane and other SAMS, and chemical linking of and electrochemical deposition on Au nanoparticles. @FootnoteText@ @footnote 1@A. A. G. Requicha, S. Meltzer, R. Resch, D. Lewis, B. E. Koel, and M. E. Thompson, Layered nanoassembly of three-dimensional structures, Proc. IEEE International Conf. on Robotics & Automation, Seoul, S. Korea, pp. 3408-3411, May 21-26, 2001.