AVS 51st International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuL

Paper EW-TuL6
Impact of Chamber Matching and Process Capability Through Flow Measurement and Adjustment

Tuesday, November 16, 2004, 1:40 pm, Room Exhibit Hall B

Session: Innovations in Vacuum Techniques and Measurements
Presenter: S.A. Tison, Mykrolis Corporation
Authors: S.A. Tison, Mykrolis Corporation
D. Leet, Mykrolis Corporation
C. Adcock, Mykrolis Corporation
S. Lu, Mykrolis Corporation
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To ensure process transparency when replacing mass flow controllers (MFC) or when employing new types of mass flow controllers in a particular process, it is often desired to have the flow rate of the replacement MFC match the flow rate of the previously installed MFCs. This can be accomplished in one of two ways. The first way is the most traditional and relies on the inherent accuracy of the MFCs, calibrated traceable to national standards. The second method relies upon an alternate standard, often the tool flow verification methodology. To accomplish the second method requires that the replacement MFC must effectively be recalibrated â?oon-toolâ? to match the output of the previous MFC. The most common method to achieve this is to use the process tool as the flow measurement standard and obtain flow data on the MFC prior to removal. After the replacement MFC is installed the same data is taken and the new MFC is adjusted to achieve the same output as previously determined with the original MFC. In addition to process transparency, the replacement or a new MFC may be adjusted on tool to ensure that the flow measurements of the MFC agrees with the process tool flow measurements to within a specified tolerance. Inherent to the technique of adjusting the MFC on the tool is the belief that the flow measurement as established by the tool is the best metric to improve process repeatability and reproducibility. This paper will not attempt to validate this claim, but focuses on how these two techniques are implemented with digital mass flow controllers and process implications.