AVS 51st International Symposium
    Applied Surface Science Wednesday Sessions
       Session AS-WeM

Paper AS-WeM8
AXSIA Analysis of TOF-SIMS Spectral and Image Series Data@footnote 1@

Wednesday, November 17, 2004, 10:40 am, Room 210A

Session: Chemometric Analysis of Spectral or Image Data; XPS/TOF-SIMS Applications
Presenter: J.A. Ohlhausen, Sandia National Laboratories
Authors: J.A. Ohlhausen, Sandia National Laboratories
K.R. Zavadil, Sandia National Laboratories
R.D. Kilgo, Sandia National Laboratories
Correspondent: Click to Email
AXSIA (Automated eXpert Spectral Image Analysis), a patented multivariate approach invented at Sandia National Laboratories, is used to provide comprehensive analysis of spectral series and spectral image series. We directly compare spectra from many different samples (spectral series) and compare spectral images from different specimens or locations (spectral image series) using this statistical approach. This method of analysis provides full spectral separation of distinct components present within the system of interest. Component variation is expected with fragmentation changes resulting from aging, contamination, concentration, molecular orientation, and chemical reaction. We use spectral series analysis to understand how component variation might be impacted by monolayer deposition and coverage. Spectral series analysis with AXSIA shows promise in extracting a more quantitative determination of the effect of saturation coverage and molecular orientation on fragmentation patterns. We have also been able to process large, complex image datasets containing a number of analysis areas at once. By using a technique of merging multiple datasets into one large dataset, a direct comparison of analysis locations is made. The relative amount of contaminant and substrate species as a function of handling and processing conditions are determined. The effects of processing and handling are readily extracted in this chemical system because all data is processed at once. As a result, the information contained in the component analysis is complete and comprehensive. @FootnoteText@ @footnote 1@This work was completed at Sandia National Laboratories, a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.