AVS 51st International Symposium
    Applied Surface Science Monday Sessions
       Session AS-MoP

Paper AS-MoP10
Depth Resolution of Inverse Calculation from ADXPS to Depth Profile

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: A. Tanaka, Physical Electronics, Japan
Authors: A. Tanaka, Physical Electronics, Japan
D.G. Watson, Physical Electronics USA
Correspondent: Click to Email
A practical inverse calculation method is discussed which transforms the data from angle dependent x-ray photoelectron spectra (ADXPS) to depth profile using a maximum entropy method. The depth resolution of the method is evaluated using an 84%-to-16% resolution, which is less than 0.7 nm for natural oxide when optimizing 5 take off angle data. Theoretical comparison is also discussed.