Abstract
Examination of the literature shows that the use of XPS is increasing around the world. Experienced XPS analysts can attest that the increased use is not always accompanied by a level of knowledge that enables the most useful or most reliable information to be extracted from the data collected. The purpose of this workshop is to provide an overview of the types of issues and concerns that should be addressed to assure those that operate XPS instruments or rely on their data of the quality of information they are getting.

At first glance acquiring data from a sample using XPS is fairly straightforward: Mount the sample and introduce it into the spectrometer, acquire data, identify the peaks, determine the chemistry, provide results. But each of these steps actually has a number of background details that are often not obvious to the sample submitter and sometimes to the analyst. For example, consider the sample: how has the sample been handled, is the sample vacuum compatible, are there likely to be volatile components present that might not be detected, if so how would one determine this and what alternatives exist for a thorough analysis? Are there other sample preparation details to consider?

Once the sample is in the spectrometer there are the data collection and spectrometer details: Is the energy scale in calibration, what about spectral resolution vs. intensity, how long should the acquisition take, is the sample x-ray sensitive, is the ion gun sputter rate known, what about preferential sputtering, what about ion beam damage and so on? Then after the data are acquired, can one rely on the relative sensitivity factors to provide reasonable quantification, how accurately can binding energies be reported, can the handbook or literature values be believed, which peaks are most useful for analysis?

This workshop will examine some to these aspects of analysis; which need to be considered on a daily basis versus what should an analyst worry about over a longer time frame. The presentation and input from different expert users will also take into consideration various viewpoints from academia to industry.

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