Divisional/Group Program

 

Advanced Surface Engineering Division (SE)

The program of the Advanced Surface Engineering Division (SE) addresses both scientists as well as technologists who are interested in new thin film materials and emerging technologies to prepare them, who need to know about their characterization and who aim at their practical use. The five oral ASED sessions, partly co-organized with other divisions, and the poster session provide a balanced mix of fundamentals and applications of surface engineering. These sessions (see below for a complete list) will particularly emphasize the basics and use of atmospheric pressure plasmas; new developments in nanostructured thin films coatings, the possibilities of glancing angle deposition, novelties in pulsed plasma processes and innovations in surface engineering for thermal management. In conjunction with the Thin Films Division (TF) a wide range of aspects in tribology are covered in joint sessions. Under these topics, presentations on novel coating materials, processes to prepare them, design and modeling, diagnostics and growth control, mechanical property characterizations, resistance to severe conditions, thermal stability and other aspects related to surface engineering and coatings are solicited.

  • SE1+PS Atmospheric Pressure Plasmas
    Michael Kong, Longborough University, UK, "Cold Atmospheric Plasma Sources for Surface Treatment"

  • SE2 Nanostructured Thin Films and Coatings
    Sam Zhang, Nanyang Technological University, Singapore, "Hard Yet Tough Nanocomposite Coatings"

  • SE3 Glancing Angle Deposition (GLAD II)
    Gwo-Ching Wang, Rensselaer Polytechnic Institute, "Evolution of Crystal Orientation during Oblique Angle Deposition"

  • SE4+PS Pulsed Plasmas in Surface Engineering
    Jaroslav Vlcek, University of Western Bohemia, Czech Republic, "Pulsed Magnetron Sputtering Systems for Reactive Deposition of Oxide and Nitride Films"

  • SE5+SS Surface Engineering for Thermal Management
    Gang Chen, Massachusetts Institute of Technology, "Near-field Radiation Heat Transfer"

  • SE6 Advanced Surface Engineering Poster Session

  • PS9+SE Atmospheric Plasma Processing and Micro Plasmas
    Jan Benedikt, Ruhr-Universität Bochum, Germany, “Deposition of SiOx Material by Means of Atmospheric Pressure Microplasma Jet: The Study of Deposition Mechanism”

  • PS14+SE Fundamentals of Pulsed Plasmas and Gas Breakdown
    John Caughman, Oak Ridge National Laboratory

  • TF11+SE Glancing Angle Deposition (GLAD) I
    Motofumi Suzuki, Kyoto University, Japan, "Progress in Glancing Angle Deposition Technology for Practical Applications"

 

Applied Surface Science Division (AS)

Applied Surface Science is of major importance to innovation and manufacturing across a broad range of industrial sectors as well as fundamental research. The Applied Surface Science Division (AS) focuses on topics including quantitative surface analysis and data interpretation, practical surface analysis (e.g. insulators and challenging samples), recent developments and applications of techniques. We welcome original work in electron and optical spectroscopies, all aspects of surface mass spectrometry, multi-technique analysis and, this year, have a special emphasis on scanning probe microscopy in a joint session with Biomaterial Interfaces (BI) and Nanometer-scale Science & Technology (NS) Divisions. We welcome abstracts on techniques such as atom probe tomography and combined surface analysis with FIB to our 3D chemical analysis session. This year we are delighted to co-sponsor the BI plenary session with a theme of “Challenges in Biomaterials Analysis” as well as joint sessions on the characterization and functionalization of nanoparticles. We are excited to support the AVS Focus Topics on Spectroscopic Ellipsometry (EL), Helium Ion Microscopy (HI), In Situ Spectroscopy and Microscopy (IS), Tribology (TR) and Transparent Conductors and Printable Electronics (TC). Our popular annual poster session will cover all aspects of applied surface science. Students are encouraged to participate in the student presentation competition; both posters and oral presentations will be considered.

  • AS1 Quantitative Surface Chemical Analysis and Technique Development
    Sven Tougaard, University of Southern Denmark, "Characterization of Nano-structures from Analysis of the XPS Background: Automation and 3D-imaging"

  • AS2 Imaging and 3D Chemical Analysis
    Takuya Miyayama, ULVAC-PHI, Japan, "Recent Applications of GCIB Depth Profiling with XPS and TOF-SIMS"
    Wilfried Vandervorst, IMEC, Belgium, "Advances in Probing 3D Semiconductor Structures"

  • AS3 Correlative Analysis - A Multi-technique Approach for Identification and Structure-Property Relationships
    Kathryn G. Lloyd, DuPont Corporate Center for Analytical Sciences, "Challenges with Multi-technique Correlation of Surface Analytical Methods"

  • AS4 Analysis of Insulators and Challenging Samples
    Donald R. Baer, Pacific Northwest National Laboratory, "Working with Difficult Samples - Preparation, Damage, Charging and Data Analysis"

  • AS5+BI Quantitative Chemical Analysis of Soft Materials and Biomaterials
    Ralf Richter, CIC biomaGUNE, Spain, "Surface-based Model Systems of Biomolecular Hydrogels - From Supramolecular Organization and Dynamics to Biological Function"

  • AS6+BI Nano-Object (including Nanoparticles) Chemical Characterization
    Emile Schweikert, Texas A&M University, "Characterization of Nano-objects by Cluster-SIMS"

  • AS7+BI+NS Advances in Scanning Probe Microscopy
    Toshio Ando, Kanazawa University, Japan, "High-Speed Atomic Force Microscopy for Filming Biomolecular Processes"
    Christopher Yip, University of Toronto, Canada, "Advances in Characterizing Membranes and Cells using Atomic Force Microscopy"

  • AS8 Applied Surface Science Poster Session

  • BI4+AS+NS+SS  Surface Functionalization of Nanostructures
    Holger Schönherr, University of Siegen, Germany, "Surface Functionalization and Analysis of Functional "Soft" Nanostructures: From 2 to 3 Dimensions"

  • BI5+AS Characterization of Biomedical Materials

  • BI7+AS Quantitative Analysis of Biomaterials
    Erika Johnston, Genzyme, "Industrial Biosurface Analysis: A Surfeit of New Frontiers"

  • BP1+AS Challenges in Biomaterials Analysis
    David Castner, University of Washington, "Wants, Needs, and Challenges in Biomedical Surface Analysis"
    Yves Dufrene, Université catholique de Louvain, Belgium, "Nanoscale Surface Analysis of Living Cells using Atomic Force Microscopy"
    Alex Shard, National Physical Laboratory, UK, "Depth Profiling and 3D Analysis of Organic Surfaces"

  • EL1+AS+TF+MS+EM+PS Spectroscopic Ellipsometry for Photovoltaics and Inorganic Thin Films
    Dean Levi, National Renewable Energy Laboratory, "Applications of Ellipsometry in Photovoltaics"

  • EL2+AS+TF+MS+EM+PS Spectroscopic Ellipsometry of Organic and Biological Materials
    Klaus-Jochen Eichhorn, Leibniz-Institut für Polymerforschung Dresden e.V., Germany, "Application of Various Spectroscopic Ellipsometry Techniques for In Situ Studies of Thin Polymer Films on Solid Substrates"

  • EL3+AS+TF+MS+EM+PS Spectroscopic Ellipsometry – Fundamentals, New Techniques, & Future Directions
    James Hilfiker, J.A. Woollam Co., Inc., "Current Trends and Future Outlook for Spectroscopic Ellipsometry"

  • HI1+AS Basics of Helium Ion Microscopy
    David C. Bell, Harvard University, "Applications of Helium Ion Microscopy"
    Colin A. Sanford, Carl Zeiss, Inc., "Principles of Helium Ion Microscopy"

  • HI2+AS+BI+NS Nano- and Bio- Imaging with Helium Ion Microscopy
    Daniel S. Pickard, National University of Singapore, "Aspects of BioImaging"
    Hongzhou Zhang, Trinity College, Ireland, "Imaging of Nanostructures"

  • IS1+AS+SS In Situ Surface Science Studies
    Miquel Salmeron, Lawrence Berkeley National Laboratory, “The changing structure of surfaces when in gaseous and liquid environments

  • IS2+AS+SS In Situ Film Growth Studies
    Guus Rijnders, University of Twente, the Netherlands, “Real-time Growth Characterization using Atomic Force Microscopy”

  • IS3+AS In Situ Studies in Novel Environments
    Niels De Jonge, Vanderbilt University, “Imaging Whole Cells in Liquid with Scanning Transmission Electron Microscopy”

  • IS4+AS+SS In Situ Beam-Scattering Studies
    Anatoly Frenkel, Yeshiva University, “In Situ X-Ray Studies”

  • IS5+AS In Situ Studies of Structure & Mechanical Properties
    Ian Robertson, University of Illinois at Urbana-Champaign and National Science Foundation, "In Situ TEM Studies of Structural Evolution"

  • NM6+AS+MS Metrology for Nanomanufacturing
    Dawn Bonnell, University of Pennsylvania, “Local Probes Enabling Science and Manufacturing”

  • NT1+AS+MI Magnetic Thin Films and Multilayers
    Thomas Brueckel, Forschungszentrum Jülich, Germany
    Chris Leighton, University of Minnesota, “Nanoscopic "Magnetic Phase Separation at the SrTiO3/La1-xSrxCoO3 Interface”

  • NT2+AS Neutron Scattering for Energy Conversion
    Jerzy Chlistunoff, Los Alamos National Laboratory, "Nafion-Carbon-Platinum Interfaces Studies using Neutron Scattering and Electrochemical Methods"
    Michael Kent, Sandia National Laboratories

  • NT3+AS+BI Biological Interfaces, Membranes, Thin Films
    Eva Y. Chi, University of New Mexico
    Mike Reinschtedter, McMaster University, Canada

  • TC1+AS Growth, Processing, and Characterization of Transparent Conductors
    Su-Huai Wei, National Renewable Energy Laboratory, "Multi-component Transparent Conducting Oxides: Progress in Materials Modeling"

  • TR2+AS+SS Atomic-scale Characterization of Tribological Interfaces
    Michael Falk, Johns Hopkins University, "Accelerated Molecular Dynamics Simulations of Tribological Interfaces"

Biomaterial Interfaces Division (BI)

In the tradition of the Biomaterial Interfaces Division (BI), a broad technical program has been established that is focused on progress in biointerface science and engineering bringing together an interdisciplinary group of experts that work at the intersection of biosurface and interface science, the nanosciences, and biomedical engineering. The BID technical program for the week incorporates classical topics such as Cells at Interfaces (including stem cells, bacteria, etc.), Biomolecules at Interfaces (Protein, peptide, DNA and sugar interactions), Characterization of Biomedical Materials and Protein-Membrane Interactions. These sessions are designed to appeal to the core of the Biomaterials Interface Division by focusing on new developments in the key strengths that have appealed to our members, while also including some new ways of looking at these classic BI topics.

  • BI1 Cells at Interfaces
    Pieter Dorrestein, University of California at San Diego, "Analysis of Cells at Interfaces"
    Todd McDevitt, Georgia Institute of Technology, "Engineering Stem Cell Differentiation via Material Properties"

  • BI2 Biomolecules at Interfaces
    Rein Uljin, University of Strathclyde, UK, "Enzyme-Responsive Surfaces"

  • BI3 Protein-Membrane Interactions
    Matthias Loesche, Carnegie Mellon University, "Membrane binding, structure and regulation of the PTEN phosphatase"

  • BI4+AS+NS+SS  Surface Functionalization of Nanostructures
    Holger Schönherr, University of Siegen, Germany, "Surface Functionalization and Analysis of Functional "Soft" Nanostructures: From 2 to 3 Dimensions"

  • BI5+AS Characterization of Biomedical Materials
    Larry Salvati, DePuy Orthopaedics, "Characterization of Biomedical Materials"

  • BI6 Sensors and Fluidics for Biomedical Applications
    Jennifer Shumaker-Perry, University of Utah, "Combining Microfluidics and Plasmon Sensing to Assess Immunogenicity"

  • BI7+AS Quantitative Analysis of Biomaterials
    Erika Johnston, Genzyme, "Industrial Biosurface Analysis: A Surfeit of New Frontiers"

  • BI8 Biomaterial Interfaces Poster Session

  • AS5+BI Quantitative Chemical Analysis of Soft Materials and Biomaterials
    Ralf Richter, CIC biomaGUNE, Spain, "Surface-based Model Systems of Biomolecular Hydrogels - From Supramolecular Organization and Dynamics to Biological Function"

  • AS6+BI Nano-Object (including Nanoparticles) Chemical Characterization
    Emile Schweikert, Texas A&M University, "Characterization of Nano-objects by Cluster-SIMS

  • AS7+BI+NS Advances in Scanning Probe Microscopy
    Toshio Ando, Kanazawa University, Japan, "High-Speed Atomic Force Microscopy for Filming Biomolecular Processes"
    Christopher Yip, University of Toronto, Canada, "Advances in Characterizing Membranes and Cells using Atomic Force Microscopy"

  • BN1+BI+MN Biofabrication Methods and Devices
    David Kaplan, Tufts University
    Jeffrey Morgan, Brown University / Rhode Island Hospital

  • BN2+BI+MN Biofabrication Applications
    William Bentley, University of Maryland
    Michael Shuler, Cornell University

  • HI2+AS+BI+NS Nano- and Bio- Imaging with Helium Ion Microscopy
    Daniel S. Pickard, National University of Singapore, "Aspects of BioImaging"
    Hongzhou Zhang, Trinity College, Ireland, "Imaging of Nanostructures"

  • MB2+BI+PS Marine Antifouling Coatings
    John Schetz, University of North Texas Health Science Center, “Advances in Sustainable Technologies for the Prevention of Marine Biofouling”

  • NT3+AS+BI Biological Interfaces, Membranes, Thin Films
    Eva Y. Chi, University of New Mexico
    Mike Reinschtedter, McMaster University, Canada

  • PS12+BI Plasmas for Medicine and Biological Applications

Electronic Materials and Processing Division (EM)

The Electronic Materials and Processing Division (EM) sponsors sessions on electronic materials synthesis, processing, characterization, and structure-property relationships. Abstracts are solicited pertaining to a wide range of inorganic and organic electronic materials, ranging from conductors to semiconductors to dielectrics and insulators. Sessions on electronic material surfaces and self-assembled monolayers, defects in electronic materials, hybrid and organic films, nanowire devices, and semiconductor growth are planned. Sessions on high-k, low-k, and memory dielectrics will be a special feature this year, and new sessions on emerging electronic materials, such as topological insulators and next-generation electronics will highlight cutting-edge research. In addition, EM is sponsoring a separate focus topic on transparent conductors and printable electronics, and is co-sponsoring sessions on photonics and plasmonic materials and in the Energy Frontiers and Graphene focus topics.

  • EM1+TF Activation and Deactivation of Surfaces with Self-assembled Monolayers
    W. Grant McGimpsey, Worcester Polytechnic Institute, "Chemical Modification of Surfaces for Biological Applications"

  • EM2 Defects in Electronic Materials
    Leonard J. Brillson, The Ohio State University, "Controlling Schottky Barriers and Doping with Native Point Defects"

  • EM3 Hybrid and Organic Electronic Materials
    Seong-Il Im, Yonsei University, Korea, "Organic/Oxide Hybrid Thin-Film Applications for Photo-detector Cells and Complementary Inverters"
    Manuel Quevedo, University of Texas at Dallas, "Hybrid Organic/Inorganic Materials and Devices for Flexible Electronics Applications"

  • EM4+TF High-k Dielectrics
    Marc Heynes, IMEC, Belgium, "High Mobility Channel Materials and Novel Devices for Scaling of Nanoelectronics beyond the Si Roadmap"
    Minghwei Hong, National Tsing Hua University, Taiwan, "Research Advances on III-V and Ge MOSFETs Beyond Si CMOS"
    Paul McIntyre, Stanford University, "Bilayer Gate Stacks for High-k Gates on Ge and InGaAs"
    Eric Vogel, University of Texas at Dallas, "A Comprehensive Electro-physical Model for the Mobility of In0.53Ga0.47As Surface Channel MOSFETs"

  • EM5 Memory Dielectrics
    Cheol-Seong Hwang, Seoul National University, Korea, "Johnson-Mehl-Avrami Type Kinetic Model for Resistance Switching in TiO2
    Derchang Kau, Intel Corp., "A Survey of Cross Point Phase Change Memory Technologies"
    Gabriel Molas, CEA LETI, France, "Charge Trap Memories and 3D Approaches"
    Kang Wang, UCLA, "Oxides for Spintronics"

  • EM6 Low-k Dielectrics
    George Antonelli, Novellus Systems, Inc., "Advanced Pre-Treatments and Low-k Dielectric Barrier Technology for Beyond 2x nm Node"
    Reinhold Dauskardt, Stanford University, "Molecular Strengthening Mechanisms for Low-k Dielectrics"
    Al Grill, IBM T.J. Watson Research Center, "Ultralow-k PECVD pSiCOH Dielectrics and their Implementation in VLSI Interconnects"
    Tony Heinz, Columbia University, "Electric and Optical Characterization of Leakage and Breakdown in Low-k Dielectric Materials"

  • EM7 Dielectrics for Novel Devices and Process Integration
    Mihaela Balseanu, Applied Materials Inc., "Boron Nitride Development and New Applications for sub-20nm Device Fabrications"
    Tetsuo Endoh, Tohoku University, Japan, "Impact of Vertical Structured Devices for Future Nano LSI"
    Alan Seabaugh, University of Notre Dame, "Interface Traps and Low Subthreshold Swing in III-V Tunnel FETs"
    Do Yeung Yoon, Seoul National University, Korea, "Novel Polysilsesquioxane Systems for Ultralow-Dielectric Films with High Modulus, Low CTE, and Closed-Pore Morphology"

  • EM8 Interfaces and Transport in Semiconductor Materials

  • EM9+NS Nanowire Electronic Devices
    Lars-Erik Wernersson, Lund University, Sweden

  • EM10 Topological Insulators
    M. Zahid Hasan, Princeton University, "Bulk Topological Insulators and Superconductors: Discovery and the Frontier"

  • EM11 Next Generation Electronics
    Tomas Palacios, Massachusetts Institute of Technology, "High Frequency Electronics based on GaN and Graphene"

  • EM12 Semiconductor Growth

  • EM13+SS Structure and Morphology of Electronic Material Surfaces

  • EM14 Electronic Materials and Processing Poster Session

  • EL1+AS+TF+MS+EM+PS Spectroscopic Ellipsometry for Photovoltaics and Inorganic Thin Films
    Dean Levi, National Renewable Energy Laboratory, "Applications of Ellipsometry in Photovoltaics"

  • EL2+AS+TF+MS+EM+PS Spectroscopic Ellipsometry of Organic and Biological Materials
    Klaus-Jochen Eichhorn, Leibniz-Institut für Polymerforschung Dresden e.V., Germany, "Application of Various Spectroscopic Ellipsometry Techniques for In Situ Studies of Thin Polymer Films on Solid Substrates"

  • EL3+AS+TF+MS+EM+PS Spectroscopic Ellipsometry – Fundamentals, New Techniques, & Future Directions
    James Hilfiker, J.A. Woollam Co., Inc., "Current Trends and Future Outlook for Spectroscopic Ellipsometry"

  • EN9+EM+NS Nanostructured Materials for Third Generation Solar Cells
    Sheila Bailey, NASA Glenn

  • EN11+EM+NS Nanowire Solar Cells
    Michael Filler, Georgia Institute of Technology
    Ali Javey, University of California Berkeley

  • ET1+EM+SS Quantum Transport: Fundamentals
    Shuji Hasegawa, University of Tokyo, Japan, "Multi-Probe STM Study of 2-D Transport on Surface State"

  • ET2+NS+EM Nanoelectronics, Interconnect, and Energy Applications
    Hanno H. Weitering, University of Tennessee, "1-D Transport in Atomic Structures"

  • ET4+EM+NS New Developments in Transport Theory and Techniques
    Art Baddorf, Oak Ridge National Laboratory, "Domain Wall Transport in Ferroelectric Materials"
    Harold Baranger, Duke University, “Quantum Phase Transition and Emergent Symmetry in a Quadruple Quantum Dot System”

  • GR2+EM Graphene: Optical Properties, Optoelectronics, Photonics and Transparent Electronics
    Andrea Ferrari, University of Cambridge, UK

  • GR9+MS+EM Graphene Device Manufacturing
    Ji Ung Lee, University at Albany
    Chun-yung Sung, IBM Research

  • GR10+EM Dielectrics on Graphene, Graphene Transfer to Novel Substrates

  • SS8+EM Semiconductor Surfaces
    Andrew Kummel, University of California, San Diego, "An Atomic View of ALD of Dielectrics on Semiconductors Using STM"

  • TF4+EM ALD/MLD: Hybrid Organic Films
    Mato Knez, Max Planck Institute of Microstructure Physics, Germany, "Hybrid Materials by Vapor Phase Infiltration"
    Myung Mo Sung, Hanyang University, Korea, “Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Molecular Layer Deposition with Atomic Layer Deposition”

  • TF8+EM Nanostructuring Thin Films
    Carl Thompson, Massachusetts Institute of Technology, "Templated Solid-State Dewetting for Patterning of Films"

  • TF12+EM+SS Applications of Self Assembled Monolayers
    Nitin Chopra, University of Alabama, "Development of Nanoscale Heterostructures: from Single Component Nanostructures to Multicomponent Nanosystems"
    Han Zuilhof, University of Wageningen, the Netherlands, "Organic Monolayers on Silicon-rich Substrates: Methods and Mechanisms"

Magnetic Interfaces and Nanostructures Division (MI)

The Magnetic Interfaces and Nanostructures Division (MI) program features pioneering, controversial, introductory and emerging results in topical areas related to magnetic interfaces and nanostructures. The 2011 MI program topics include: (1) fundamental problems in magnetism (e.g., are half-metals half-metallic, reduced dimensionality, accounting for and understanding d and f correlation); (2) the forefront of topological insulators; (3) future spintronics, magnetoelectrics, Rashba interactions and all things multiferroic; (4) new pumps and probes in magnetic imaging and characterization. The 2011 program highlights electron spin related phenomena at the crossroad of basic and applied. We are also co-sponsoring the Actinides and Rare Earths Focus Topic (AC), the Neutron Scattering Focus Topic (NS) and the Spins in Graphene and Related Materials Focus Topic (GR). Noted invited speakers anchor each of these topics and topical conferences. The Magnetic Interfaces and Nanostructures Division will be selecting the best graduate student presentation from three finalists for the Leo Falicov Award. The winner of this award will be announced during the break of the Thursday morning session. The division will also offer an award for postdoctoral fellows who will be presenting MIND papers at this year’s International Symposium.

  • MI1 Fundamental Problems in Magnetism
    Mairbek Chshiev, CEA LETI, France
    Claudia Felser, University of Mainz, Germany

  • MI2 Topological Insulators and Rashba Interactions
    Elio Vescovo, Brookhaven National Laboratory
    Qi-Kun Xue, Tsinghua University, China, “Low Temperature Scanning Tunneling Microscopy of Magnetically Doped Topological Insulator”

  • MI3 Spintronics, Magnetoelectronics, Multiferroics, and Dilute Magnetic Semiconductor Applications
    Kirill Belashchenko, University of Nebraska-Lincoln
    William Butler, The University of Alabama

  • MI4 Emerging Pumps and Probes in Magnetic Imaging and Characterization
    Chi-Chang Kao, Stanford University
    Thomas Z. Ward, Oak Ridge National Laboratory, “Controlling Electronic Phase Separation in Strongly Correlated Systems with Ferromagnetic Nanodots”

  • MI5 Magnetic Interfaces and Nanostructures Poster Session

  • AC1+MI Magnetic and Electron Correlation Effects in Actinides and Rare Earths
    G. Malcolm Stocks, Oak Ridge National Laboratory, "Recent Work on Magnetism, Actinides and Defects at ORNL"

  • GR4+MI Graphene: Magnetic Properties and Spintronics
    Klaus Kern, Max-Planck-Institut für Festkörperforschung, Germany

  • NT1+AS+MI Magnetic Thin Films and Multilayers
    Thomas Brueckel, Forschungszentrum Jülich, Germany
    Chris Leighton, University of Minnesota, “Nanoscopic "Magnetic Phase Separation at the SrTiO3/La1-xSrxCoO3 Interface”

Manufacturing Science and Technology Group (MS)

This year, Manufacturing Science and Technology Group (MS) will primarily focus on manufacturing aspects of a variety of technology areas. These include areas that MSTG has worked in previously such as carbon based nanoelectronic devices, especially on graphene and in in-line measurements. This year, MSTG adds two new topical areas: photovoltaic materials and applications of ALD technology. We will discuss different solar cell substrate selection and current development status including CIGS, CdTe, II-V, flexible Si, and organic materials. The manufacturing issues will also be addressed in the PV manufacturing session of the Energy Frontier focus topic. ALD technology session will have different industry experts and academia to present the recent ALD process development, manufacturing process control, and tool design concepts. We are co-sponsoring a session on ‘Graphene Nanoelectronics’ with the Graphene Focus Topic.

  • MS1+NM What is Needed to use ALD for Manufacturing?
    Steven George, University of Colorado at Boulder, "Atomic Layer Deposition for Continuous Roll-to-Roll Processing"

  • MS2 ALD Tool for Manufacturing
    Brian Lu, AIXTRON

  • MS3 ALD Manufacturing Control Issues
    Gert Leusink, Tokyo Electron America Inc.,

  • MS4 Manufacturing Science and Technology Poster Session

  • EL1+AS+TF+MS+EM+PS Spectroscopic Ellipsometry for Photovoltaics and Inorganic Thin Films
    Dean Levi, National Renewable Energy Laboratory, "Applications of Ellipsometry in Photovoltaics"

  • EL2+AS+TF+MS+EM+PS Spectroscopic Ellipsometry of Organic and Biological Materials
    Klaus-Jochen Eichhorn, Leibniz-Institut für Polymerforschung Dresden e.V., Germany, "Application of Various Spectroscopic Ellipsometry Techniques for In Situ Studies of Thin Polymer Films on Solid Substrates"

  • EL3+AS+TF+MS+EM+PS Spectroscopic Ellipsometry – Fundamentals, New Techniques, & Future Directions
    James Hilfiker, J.A. Woollam Co., Inc., "Current Trends and Future Outlook for Spectroscopic Ellipsometry"

  • EN18+MS Photovoltaics Manufacturing
    Salah Bedair, North Carolina State University
    Bob Conner, Semprius
    Pradeep Haldar, University at Albany SUNY
    Eric Seymour, Advanced Energy Industries, Inc.

  • GR9+MS+EM Graphene Device Manufacturing
    Ji Ung Lee, University at Albany
    Chun-yung Sung, IBM Research

  • NM1+MS Challenges Facing Nanomanufacturing (All Invited Session)
    John Busbee, Wright-Patterson Air Force Base
    Mihail Roco, National Science Foundation
    Mark Tuominen, University of Massachusetts Amherst

  • NM2+TF+MS Materials Processes for Nanomanufacturing
    Rod Ruoff, The University of Texas at Austin, "Large-scale Graphene: Challenges and Progress"
    Brian E. Goodlin, Texas Instruments

  • NM3+MS+NS Manufacturable Nanoscale Devices
    Teri Odom, Northwestern University, “A SANE Approach to Programmable Soft Lithography”

  • NM4+NS+MS+TF Directed Assembly for Nanomanufacturing
    Paul F. Nealey, University of Wisconsin, "Advancing the lithographic process for nanomanufacturing using self-assembling block copolymers"

  • NM5+MS Environmental Concerns in Nanomanufacturing
    Vicki Colvin, Rice University

  • NM6+AS+MS Metrology for Nanomanufacturing
    Dawn Bonnell, University of Pennsylvania, “Local Probes Enabling Science and Manufacturing”

  • VT6+MN+NS+MS Vacuum Technology for the Next Generation Nanofabrication and Graphene Physics
    Joseph A. Stroscio, National Institute of Standards and Technology, "New UHV Low Temperature Scanning Probe Microscopy (SPM) Facility for the Study of Future Electronic Materials"

MEMS and NEMS Technical Group (MN)

The MEMS and NEMS Technology Group (MN) program will highlight recent advances in emerging areas of micromechanical systems at the micro and nanoscale ranging from fundamental studies of functional, integrated devices to novel applications of micro and nanoelectromechanical systems (MEMS/NEMS). The ability to collectively manipulate, control and detect vibrational dynamics of MEMS/NEMS raises intriguing possibilities of integrating these devices with existing fluidic, electronic and optical on-chip networks. This year’s session will cover these areas which are thematically related to multi-scale interaction of materials with focus directed towards lithography, pattern transfer and fabrication at the micro- and nano-scale, along with integration and packaging of MEMS and NEMS and characterization for MEMS and NEMS. Additionally, applications of MEMS and NEMS devices in the sensing arena by employing local biochemically functionalized nanoscale sites on surface of NEMS oscillator arrays for selective biomolecular adsorption, integration with active CMOS architectures for RF-MEMS applications, high Q-resonant dynamics in air, nanoscale vibrational mass sensing using fluidic resonators, ultrananocrystalline diamond nanowires and thin film nanostructuring, deep silicon etching for device fabrication and packaging, parametric excitation and nonlinear dynamics, integrated gas chromatography system, and advanced nanofabrication techniques are the core topics of discussions.

  • MN1 Multi-scale Interactions of Materials and Fabrication at the Micro- and Nano-scale
    Daniel Lopez, Argonne National Laboratory

  • MN2 Integration and Packaging of MEMS and NEMS
    Chris Gudeman, Innovative Micro Technology (IMT)

  • MN3 Characterization for MEMS and NEMS
    Horacio Espinosa, Northwestern University

  • MN4 Innovations in Lithography and Patterning for Nanosystems
    Michael Guillorn, IBM TJ Watson Research Center

  • MN5 MEMS and NEMS Poster Session

  • BN1+BI+MN Biofabrication Methods and Devices
    David Kaplan, Tufts University
    Jeffrey Morgan, Brown University / Rhode Island Hospital

  • BN2+BI+MN Biofabrication Applications
    William Bentley, University of Maryland
    Michael Shuler, Cornell University

  • GR5+MN Graphene: Mechanical and Thermal Properties, Graphene MEMS and NEMS
    Paul McEuen, Cornell University

  • PS10+MN Plasma Processing for 3D Integration, TSV, and MEMS
    Yasuhiro Morikawa, ULVAC, Inc., Japan "Scallop Free TSV Etching Method For 3-D LSI Integration"

  • VT6+MN+NS+MS Vacuum Technology for the Next Generation Nanofabrication and Graphene Physics
    Joseph A. Stroscio, National Institute of Standards and Technology, "New UHV Low Temperature Scanning Probe Microscopy (SPM) Facility for the Study of Future Electronic Materials"

Nanometer-scale Science and Technology Division (NS)

The Nanometer-scale Science and Technology Division (NS) explores the exciting and rapidly evolving science and technology enabled by nanoscale structures. Researchers from around the globe will present their work on topics ranging from fabricating atomically precise devices to exploiting nano-scale control of materials for biological applications and to control light. Multiple themes are explored such as assembly of nanoparticles and nanowires, biomimetic and hierarchical patterning over multiple length scales, and the challenges of characterizing such structures. We have invited nine speakers who will provide perspective from the forefront of their respective fields and will highlight the sessions on frontiers of imaging and characterization at the nanoscale, nanowires and nanoparticles: synthesis and characterization, nanowires and nanoparticles: assembly, applications, and devices, carbon-based nanomaterials, nanomaterials and interfaces in biological systems, nanoscale device fabrication, testing, and manufacturing, nanophotonics and plasmonics, and biomimetic and hierarchical patterning. Additional co-sponsored sessions cover the areas of nanostructures for energy conversion, nanostructures for energy storage, nanomechanics and nanotribology, graphene chemistry, graphene nanoribbons, organic photovoltaics, and in-situ scanning probe microscopy and spectroscopy.

  • NS1 Nanoscale Device Fabrication, Testing and Manufacture
    Stanley Williams, Hewlett-Packard Research Labs, "Memresistance and Negative Differential Resistance in Nanoscale Electronic Devices"

  • NS2 Nanowires and Nanoparticles I: Characterization and Synthesis
    Lars Samuelson, Lund University, Sweden, "Semiconductor Nanowires: From Materials Physics to Devices"

  • NS3 Nanowires and Nanoparticles II: Assembly and Applications
    Theresa Mayer, Pennsylvania State University, "Adding New Capabilities to Silicon CMOS via Deterministic Nanowire Assembly"

  • NS4 Carbon-Based Nanomaterials
    Phaedon Avouris, IBM T.J. Watson Research Center, "Carbon-Based Electronics and Optoelectronics"

  • NS5 Frontiers in Nanoscale Imaging and Characterization
    Donald Eigler, IBM Almaden Research Center, "Spin Excitation Spectroscopy"

  • NS6 Biomimetic and Hierarchical Patterning
    Stanislav Gorb, University of Kiel, Germany, "Biological and Biomimetic Attachment Devices: What Can We Learn from Evolution"

  • NS7 Frontiers in Nanophotonics and Plasmonics
    Evelyn Hu, Harvard University, "Gap-Mode Plasmonic Cavities"

  • NS8 Molecular Assembly and Devices
    Latha Venkataraman, Columbia University, "Electronics and Mechanics of Single Molecule Circuits"

  • NS9 Nanomaterials and Interfaces in Biological Systems
    Weiwei Gao, Harvard-MIT Health Science & Technology, "Combined Chemical and Biological Approaches to Enhance Nanoparticle Drug Delivery"

  • NS10 Nanometer Scale Science and Technology Poster Session

  • AS7+BI+NS Advances in Scanning Probe Microscopy
    Toshio Ando, Kanazawa University, Japan, "High-Speed Atomic Force Microscopy for Filming Biomolecular Processes"
    Christopher Yip, University of Toronto, Canada, "Advances in Characterizing Membranes and Cells using Atomic Force Microscopy"

  • BI4+AS+NS+SS  Surface Functionalization of Nanostructures
    Holger Schönherr, University of Siegen, Germany, "Surface Functionalization and Analysis of Functional "Soft" Nanostructures: From 2 to 3 Dimensions"

  • EM9+NS Nanowire Electronic Devices
    Lars-Erik Wernersson, Lund University, Sweden

  • EN9+EM+NS Nanostructured Materials for Third Generation Solar Cells
    Sheila Bailey, NASA Glenn

  • EN11+EM+NS Nanowire Solar Cells
    Michael Filler, Georgia Institute of Technology
    Ali Javey, University of California Berkeley

  • EN12+NS Organic Photovoltaics
    Marc Baldo, MIT, "Excitonic Antennas for Solar Cells"

  • EN13+NS Nanostructures for Energy Storage and Fuel Cells
    Khalil Amine, Argonne National Laboratory, "Nanostructured Anodes and Cathodes for Improved Power and Energy Density for Automotive Applications"
    Jianyu Huang, Sandia National Laboratories, "In Situ Observation of Battery Operation at Atomic Resolution"
    Fritz Prinz, Stanford University
    Andreas Stein, University of Minnesota, "Templating of Porous Materials for Energy Storage and Generation"

  • EN14+NS Nanostructured Materials for Thermophotovoltaics, Thermoelectrics & Plasmonics
    Rana Biswas, Iowa State University & Ames Laboratory U.S. D.O.E. , “Photonic and Plasmonic Crystals for Thermophotonics and Energy Conversion”
    David Norris, ETH Zurich, Switzerland
    Rachel Segalman, University of California Berkeley
    Dmitri Talapin, University of Chicago, “Design of Nanostructured Thermoelectric Materials by Self-Assembly of Colloidal Nanocrystals and Molecular Metal Chalcogenide Linkers”

  • EN15+NS Ultrafast Charge and Energy Transfer in Nanomaterials
    Victor Klimov, Los Alamos National Laboratory
    William Tisdale, MIT
    Emily Weiss, Northwestern University

  • ET2+NS+EM Nanoelectronics, Interconnect, and Energy Applications
    Hanno H. Weitering, University of Tennessee, "1-D Transport in Atomic Structures"

  • ET3+NS+GR Electronic Transport Spectroscopy in Carbon-based Nanostructures
    Stephen Cronin, University of Southern California, "Transport and Raman of Nanotubes"
    Philip Kim, Columbia University, "Electron Transport in Graphene Nanoribbon"

  • ET4+EM+NS New Developments in Transport Theory and Techniques
    Art Baddorf, Oak Ridge National Laboratory,
    "Domain Wall Transport in Ferroelectric Materials"
    Harold Baranger, Duke University, “Quantum Phase Transition and Emergent Symmetry in a Quadruple Quantum Dot System”

  • GR7+NS+NS+PS Graphene: Surface Chemistry, Functionalization, Plasma Processing and Sensor Applications
    Jeremy Robinson, Naval Research Laboratory

  • GR8+TF+NS Graphene Nanoribbons and Related Structures
    Michael Arnold, University of Wisconsin-Madison
    Klaus Mullen, Max Planck Institute for Polymer Research, Germany

  • HI2+AS+BI+NS Nano- and Bio- Imaging with Helium Ion Microscopy
    Daniel S. Pickard, National University of Singapore, "Aspects of BioImaging"
    Hongzhou Zhang, Trinity College, Ireland, "Imaging of Nanostructures"

  • NM3+MS+NS Manufacturable Nanoscale Devices
    Teri Odom, Northwestern University, “A SANE Approach to Programmable Soft Lithography”

  • NM4+NS+MS+TF Directed Assembly for Nanomanufacturing
    Paul F. Nealey, University of Wisconsin, "Advancing the lithographic process for nanomanufacturing using self-assembling block copolymers"

  • TC2+NS Printable Electronics
    John Wager, Oregon State University, "Amorphous Oxide Semiconductor Thin-Film Transistors"

  • VT6+MN+NS+MS Vacuum Technology for the Next Generation Nanofabrication and Graphene Physics
    Joseph A. Stroscio, National Institute of Standards and Technology, "New UHV Low Temperature Scanning Probe Microscopy (SPM) Facility for the Study of Future Electronic Materials"

Plasma Science and Technology Division (PS)

The Plasma Science and Technology Division (PS) program highlights state-of-the-art advances in plasma research, ranging from fundamental studies of plasma physics and chemistry to new applications in plasma processing. Abstracts describing novel research are being solicited in the areas of plasma etching and deposition, plasma modeling, plasma-surface interactions, plasma sources, 3-D integration (including TSV and MEMS), and plasma diagnostics, sensors and control. One may also choose to present emerging work that focuses on atomic layer or neutral beam processing, atmospheric pressure plasmas, microplasmas, liquids and multiphase discharges, medical and biological applications of plasma science. After a successful second year, we are excited to continue offering a session on “Plasma Processing for Photovoltaics” in conjunction with the Energy Frontiers Focus Topic. We are participating in three new Focus Topics: “Spectroscopic Ellipsometry”, “Marine Biofouling” and “Graphene and Related Materials”. In addition to the oral sessions, abstracts may be submitted to the poster session, which provides an excellent opportunity for one-on-one discussion of new results with colleagues.

  • PS1 Advanced BEOL / Interconnect Etching
    Masanaga Fukasawa, Sony Corporation, Japan, "Surface Reaction Control in Hydrogen-Containing Plasma"
    Eric A. Hudson, Lam Research Corp.

  • PS2 Advanced FEOL / Gate Etching
    Maxime Darnon, CNRS-LTM, France
    Deirdre Olynick, Lawrence Berkeley National Laboratory

  • PS3+SS Plasma Surface Interactions (Fundamentals & Applications)
    Eray S. Aydil, University of Minnesota
    Takeshi Kitajima, National Defense Academy, Japan

  • PS4 Plasma Diagnostics, Sensors and Control
    Ed Barnat, Sandia National Laboratories

  • PS5 Plasma Modeling
    Natalia Yu Babaeva, University of Michigan, Ann Arbor, “Challenges of Plasma Modeling in Biology and Medicine: What Insights Can You Expect?”

  • PS6 Plasma Sources
    Lee Chen, Tokyo Electron America Inc.

  • PS7 Neutral Beam and Low Damage Processing
    Seiji Samukawa, Tohoku University, Japan

  • PS8+TF Plasma Deposition and Plasma Enhanced ALD
    Colin Wolden, Colorado School of Mines, “Plasma Deposition of Carbide-based Membranes for High Temperature H2 Separations”

  • PS9+SE Atmospheric Plasma Processing and Micro Plasmas
    Jan Benedikt, Ruhr-Universität Bochum, Germany, “Deposition of SiOx Material by Means of Atmospheric Pressure Microplasma Jet: The Study of Deposition Mechanism”

  • PS10+MN Plasma Processing for 3D Integration, TSV, and MEMS
    Yasuhiro Morikawa, ULVAC, Inc., Japan, "Scallop Free TSV Etching Method For 3-D LSI Integration"

  • PS11+TF Plasma Processing for Non-Volatile Memory Materials
    Mark Kiehlbauch, Micron Technology

  • PS12+BI Plasmas for Medicine and Biological Applications

  • PS13 Multiphase (Liquid, Solid, Gas) Plasmas
    Peter Bruggeman, Eindhoven University of Technology, the Netherlands, “Water Containing Non-Equilibrium Atmospheric Pressure Plasmas”

  • PS14+SE Fundamentals of Pulsed Plasmas and Gas Breakdown
    John Caughman, Oak Ridge National Laboratory

  • PS15 Plasma Science and Technology Poster Session

  • EL1+AS+TF+MS+EM+PS Spectroscopic Ellipsometry for Photovoltaics and Inorganic Thin Films
    Dean Levi, National Renewable Energy Laboratory, "Applications of Ellipsometry in Photovoltaics"

  • EL2+AS+TF+MS+EM+PS Spectroscopic Ellipsometry of Organic and Biological Materials
    Klaus-Jochen Eichhorn, Leibniz-Institut für Polymerforschung Dresden e.V., Germany, "Application of Various Spectroscopic Ellipsometry Techniques for In Situ Studies of Thin Polymer Films on Solid Substrates"

  • EL3+AS+TF+MS+EM+PS Spectroscopic Ellipsometry – Fundamentals, New Techniques, & Future Directions
    James Hilfiker, J.A. Woollam Co., Inc., "Current Trends and Future Outlook for Spectroscopic Ellipsometry"

  • EN4+PS Plasmas for Photovoltaics & Energy Applications
    Erwin Kessels, Eindhoven University of Technology, the Netherlands
    Seokjae Yoo, National Fusion Research Institute, Korea

  • GR7+NS+NS+PS Graphene: Surface Chemistry, Functionalization, Plasma Processing and Sensor Applications
    Jeremy Robinson, Naval Research Laboratory

  • MB2+BI+PS Marine Antifouling Coatings
    John Schetz, University of North Texas Health Science Center, “Advances in Sustainable Technologies for the Prevention of Marine Biofouling”

  • SE1+PS Atmospheric Pressure Plasmas
    Michael Kong, Longborough University, UK, "Cold Atmospheric Plasma Sources for Surface Treatment"

  • SE4+PS Pulsed Plasmas in Surface Engineering
    Jaroslav Vlcek, University of Western Bohemia, Czech Republic, "Pulsed Magnetron Sputtering Systems for Reactive Deposition of Oxide and Nitride Films"

Surface Science Division (SS)

The Surface Science Division (SS) provides a forum for cutting-edge research that involves solid surfaces and interfaces. Phenomena that take place at the gas-solid and liquid-solid interfaces are prominent within the Division programs. Technical sessions address atomistic, electronic and chemical phenomena at surfaces and interfaces, their impact on materials properties, and their implication for technology and environmental processes. Surface Chemistry is an important divisional theme, encompassing the kinetics and dynamics of surface chemical events from adsorption and reaction to catalysis. Film growth is another key theme, explored from a fundamental perspective, through the development of new growth and processing methods for materials preparation. Surface chemical modification is an important focus, as is the interaction of surfaces with radiation, energetic species and charged particles. Lively sessions are devoted to the surface science of newly discovered materials and their emergent properties, as well as the metallic, semiconductor, oxide and organic surfaces that support unique chemical activity and electronic properties. Surface science applications in high-impact areas - particularly energy science, nanotechnology, and environmental science - are highlighted in the program. This Division's overarching goal is to provide the atomistic insights on solid surfaces and interfaces needed to advance our understanding of materials systems and benefit society. We are co-sponsoring a session on ‘Surface Science of Low-Dimensional Carbon’ with the Graphene Focus Topic.

  • SS1 Chemisorption & Surface Reaction
    Bjoerk Hammer, University of Aarhus, Denmark, "Dynamics in Chemisorption & Self Assembly"
    Martin Sterrer, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Germany, "Charge-Mediated Chemisorption on Supported Clusters"

  • SS2 Reactivity & Selectivity on Catalyst Surfaces
    D. Wayne Goodman, Texas A & M University, "Catalytically Active Au Nanoparticles"
    Manos Mavrikakas, University of Wisconsin-Madison, "The Role of Hydrogen in Heterogeneously Catalyzed Reactions"

  • SS3 Surface Chemical Dynamics
    Karina Morgenstern, University of Hannover, Germany, "STM Insights on Single-Molecule Dynamics"

  • SS4 Atomistic Processes in Nucleation & Growth
    Norman Bartelt, Sandia National Laboratories, "Carbon Diffusion in the Growth of Epitaxial Graphene"

  • SS5 Oxide Surface Structure & Reactivity
    Susannah Scott, University of California, Santa Barbara, "Electronic Structure of Oxide-Supported Catalysts under Reaction"

  • SS6 Organic Electronic Interfaces
    Francesco Stellacci, Ecole Polytechnique Fédérale de Lausanne, Switzerland, "The Effect of Structure on Interfacial Energy"

  • SS7 Self Assembly & Surface Functionalization
    Trolle Linderoth, University of Aarhus, Denmark, "Conformational chirality, chiral switching and chiral induction in self-assembled molecular structures"
    Steven L. Tait, Indiana University , "Structural Analysis and Electronic Properties of Negatively Charged TCNQ: 2D Networks"

  • SS8+EM Semiconductor Surfaces
    Andrew Kummel, University of California, San Diego, "An Atomic View of ALD of Dielectrics on Semiconductors Using STM"

  • SS9 Water Films & Environmental Interfaces
    John Hemminger, University of California, Irvine, "Composition and Chemistry at the Liquid/Vapor Interface of Aqueous Solutions: Liquid-Jet XPS Experiments Coupled with MD Simulations"
    Bruce Kay, Pacific Northwest National Laboratory, "Diffusivity in Supercooled Water Films"

  • SS10 Electrochemical and Liquid-Solid Interfaces
    Klaus Wandelt, University of Bonn, Germany, "Redox Activity & Structural Transitions at Electrochemical Interfaces"

  • SS11+GR Surface Science of Low-Dimensional Carbon
    Yves Chabal, University of Texas, Dallas, "Infrared Tracking of Oxidation at Graphene Surfaces"

  • SS12 Ferroelectric Surfaces
    Eric Altman, Yale University, "Polarization Dependence of the Surface and Interfacial Chemistry of Ferroelectric Oxides"

  • SS13 Surface Science Poster Session

  • AC2+SS The Surface Science of Actinides and Rare Earths
    David Pugmire, Los Alamos National Laboratory, "Oxidation of Pu and Actinide Materials"

  • BI4+AS+NS+SS  Surface Functionalization of Nanostructures
    Holger Schönherr, University of Siegen, Germany, "Surface Functionalization and Analysis of Functional "Soft" Nanostructures: From 2 to 3 Dimensions"

  • EM13+SS Structure and Morphology of Electronic Material Surfaces

  • ET1+NS+SS Quantum Transport: Fundamentals
    Shuji Hasegawa, University of Tokyo, Japan, "Multi-Probe STM Study of 2-D Transport on Surface State"

  • GR7+NS+NS+PS Graphene: Surface Chemistry, Functionalization, Plasma Processing and Sensor Applications
    Jeremy Robinson, Naval Research Laboratory

  • IS1+AS+SS In Situ Surface Science Studies
    Miquel Salmeron, Lawrence Berkeley National Laboratory, “The changing structure of surfaces when in gaseous and liquid environments

  • IS2+AS+SS In Situ Film Growth Studies
    Guus Rijnders, University of Twente, the Netherlands, “Real-time Growth Characterization using Atomic Force Microscopy”

  • IS4+AS+SS In Situ Beam-Scattering Studies
    Anatoly Frenkel, Yeshiva University, “In Situ X-Ray Studies”

  • PS3+SS Plasma Surface Interactions (Fundamentals & Applications)
    Eray S. Aydil, University of Minnesota
    Takeshi Kitajima, National Defense Academy, Japan

  • SE5+SS Surface Engineering for Thermal Management
    Gang Chen, Massachusetts Institute of Technology, "Near-field Radiation Heat Transfer"

  • TF12+EM+SS Applications of Self Assembled Monolayers
    Nitin Chopra, University of Alabama, "Development of Nanoscale Heterostructures: from Single Component Nanostructures to Multicomponent Nanosystems"
    Han Zuilhof, University of Wageningen, the Netherlands, "Organic Monolayers on Silicon-rich Substrates: Methods and Mechanisms"

  • TR2+AS+SS Atomic-scale Characterization of Tribological Interfaces
    Michael Falk, Johns Hopkins University, "Accelerated Molecular Dynamics Simulations of Tribological Interfaces"

  • VT5+SS Surface Science for Accelerators

Thin Film Division (TF)

The Thin Film Division (TF) is requesting abstracts for the 58th AVS International Symposium. Thin Films highlights the core Atomic Layer Deposition (ALD) program, with 5 sessions focusing on Energy Applications, Fundamental Reactions and Film Properties, Emerging Applications, Hybrid Organic Films, and Semiconductors and Nanostructures. Abstracts are also solicited for sessions on Growth and Characterization, Nanostructuring Thin Films, Modeling and Analysis, Glancing Angle Deposition (GLAD), and Nonvolatile Memories. Exciting new additions to the program include Post Deposition Processing and Applications of Self Assembled Monolayers. Thin Films is also co-sponsoring TF for Photovoltaics and TF for Solar Fuels to be highlighted in the Energy Frontiers Focus Topic, in addition to organizing a Focus Topic on Spectroscopic Ellipsometry. As the home division for Graphene at the AVS, Thin Films will again contribute co-sponsored sessions on Electronic Properties along with GNRs to its Focus Topic. The Thin Films Division is also contributing to a Focus Topic on Rare Earth and Actinide Thin Films and co-sponsoring sessions on Magnetic Thin Films.

  • TF1 Emerging ALD Applications
    Eric Dickey, Lotus Applied Technologies, "High Rate Continuous Roll-to-Roll Atomic Layer Deposition"
    Vladimir Kuznetsov, Levitech, the Netherlands, "Atmospheric ALD of Al2O3 for a High Throughput c-Si Solar Cell Passivation"

  • TF2+EN ALD for Energy
    Gary W. Rubloff, University of Maryland, "ALD: Enabling Designer Nanostructures for Energy Applications"

  • TF3 ALD: Fundamental Reactions and Film Properties
    Sumit Agarwal, Colorado School of Mines, "Gas-Surface Interactions during Atomic Layer Deposition"
    Helmut Baumgart, Old Dominion University, "Mechanical Properties of ALD Films"

  • TF4+EM ALD/MLD: Hybrid Organic Films
    Mato Knez, Max Planck Institute of Microstructure Physics, Germany, "Hybrid Materials by Vapor Phase Infiltration"
    Myung Mo Sung, Hanyang University, Korea, “Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Molecular Layer Deposition with Atomic Layer Deposition”

  • TF5 ALD for Semiconductors and Nanostructures
    Brian Willis, University of Connecticut, “In Situ Studies of Oxide ALD for Crystalline Oxide Growth on Silicon”

  • TF6 Thin Films: Growth and Characterization
    Jon-Paul Maria, North Carolina State University, "Flux and Surfactant-Assisted Physical Vapor Deposition: New Approaches for Improving Complex Oxide Thin Film Growth"

  • TF7 Modeling and Analysis of Thin Films
    Oleg Mryasov, University of Alabama, "Composition and Finite Size Effects in Thin Ferromagnetic Films for Data Storage Applications: Magnetics and Transport Properties"

  • TF8+EM Nanostructuring Thin Films
    Carl Thompson, Massachusetts Institute of Technology, "Templated Solid-State Dewetting for Patterning of Films"

  • TF9 Nonvolatile Memory
    Eric Joseph, IBM T.J. Watson Research Center, "Characterizing the Chemical and Structural Effects of Processing on Chalcogenide and Ferromagnetic Materials for Phase Change and Spin Torque Based Non-volatile Memory Technologies"
    Christian Wenger, IHP - Materials Research, "Embedded HfO2 based 1T1R Cells for Future RRAM Applications"

  • TF10 Post-Deposition Processing of Thin Films
    Yue Kuo, Texas A&M University, "Post Deposition Annealing Effects on Thin Film Material, Process, and Device Properties"

  • TF11+SE Glancing Angle Deposition (GLAD) I
    Motofumi Suzuki, Kyoto University, Japan, "Progress in Glancing Angle Deposition Technology for Practical Applications"
    TF12+EM+SS Applications of Self Assembled Monolayers
    Nitin Chopra, University of Alabama, "Development of Nanoscale Heterostructures: from Single Component Nanostructures to Multicomponent Nanosystems"
    Han Zuilhof, University of Wageningen, the Netherlands, "Organic Monolayers on Silicon-rich Substrates: Methods and Mechanisms"

  • TF13 Thin Films Poster Session
    AC3+TF The Structure, Properties and Chemistry of Thin Films of Actinides and Rare Earths
    Moritz Schmidt, Argonne National Laboratory, "Plutonium Sorption and Reactivity at the Solid/Water Interface"

  • EL1+AS+TF+MS+EM+PS Spectroscopic Ellipsometry for Photovoltaics and Inorganic Thin Films
    Dean Levi, National Renewable Energy Laboratory, "Applications of Ellipsometry in Photovoltaics"

  • EL2+AS+TF+MS+EM+PS Spectroscopic Ellipsometry of Organic and Biological Materials
    Klaus-Jochen Eichhorn, Leibniz-Institut für Polymerforschung Dresden e.V., Germany, "Application of Various Spectroscopic Ellipsometry Techniques for In Situ Studies of Thin Polymer Films on Solid Substrates"

  • EL3+AS+TF+MS+EM+PS Spectroscopic Ellipsometry – Fundamentals, New Techniques, & Future Directions
    James Hilfiker, J.A. Woollam Co., Inc., "Current Trends and Future Outlook for Spectroscopic Ellipsometry"

  • EM1+TF Activation and Deactivation of Surfaces with Self-assembled Monolayers
    W. Grant McGimpsey, Worcester Polytechnic Institute, "Chemical Modification of Surfaces for Biological Applications"

  • EM4+TF High-k Dielectrics
    Marc Heynes, IMEC, Belgium, "High Mobility Channel Materials and Novel Devices for Scaling of Nanoelectronics beyond the Si Roadmap"
    Minghwei Hong, National Tsing Hua University, Taiwan, "Research Advances on III-V and Ge MOSFETs Beyond Si CMOS"
    Paul McIntyre, Stanford University, "Bilayer Gate Stacks for High-k Gates on Ge and InGaAs"
    Eric Vogel, University of Texas at Dallas, "A Comprehensive Electro-physical Model for the Mobility of In0.53Ga0.47As Surface Channel MOSFETs"

  • EN6+TF Thin Films for Solar Cells
    Craig Taylor, Colorado School of Mines

  • EN7+TF Thin Film Chalcogenide Solar Cells (CIGS, CZTS, CdTe and Related Materials)
    David Mitzi, IBM T.J. Watson Research Center, "Progress Towards a High-Efficiency Cu-Zn-Sn-S-Se Thin-Film PV Technology"

  • EN8+TF Thin Films for Solar Fuels
    Kevin Sivula, Ecole Polytechnique Fédérale de Lausanne, Switzerland, “Nanostructured Thin Films for Solar Water Splitting”

  • GR3+TF Graphene: Electronic Properties and Charge Transport
    Michael Fuhrer, University of Maryland
    Daniel Gunlycke, U.S. Naval Research Laboratory, "Electronic and Magnetic Properties of a Graphene Line Defect"

  • GR8+TF+NS Graphene Nanoribbons and Related Structures
    Michael Arnold, University of Wisconsin-Madison
    Klaus Mullen, Max Planck Institute for Polymer Research, Germany

  • NM2+TF+MS Materials Processes for Nanomanufacturing
    Rod Ruoff, The University of Texas at Austin, "Large-scale Graphene: Challenges and Progress"
    Brian E. Goodlin, Texas Instruments

  • NM4+NS+MS+TF Directed Assembly for Nanomanufacturing
    Paul F. Nealey, University of Wisconsin, "Advancing the lithographic process for nanomanufacturing using self-assembling block copolymers"

  • PS8+TF Plasma Deposition and Plasma Enhanced ALD
    Colin Wolden, Colorado School of Mines, “Plasma Deposition of Carbide-based Membranes for High Temperature H2 Separations”

  • PS11+TF Plasma Processing for Non-Volatile Memory Materials
    Mark Kiehlbauch, Micron Technology

Vacuum Technology Division (VT)

The Vacuum Technology Division (VT) is soliciting abstract submissions addressing both long standing and emerging issues important to a wide variety of advanced technology applications. Topics will include: special sessions on accelerator surface science, energy frontiers, and nanotechnology along with traditional sessions on pumping, outgassing, gas analysis, vacuum gauging, gas-flow modeling, calibration methods and accelerators and large vacuum systems. Emerging topics are solicited with sessions on vacuum technology for next generation nanofabrication and graphene physics, renewable solutions for energy storage/production, and unique surface science materials/treatments for accelerators. Process measurements for trace-gas-analysis, gas-delivery and contamination control will include mass spectroscopy and optical spectroscopy methods. VTD is promoting student involvement with a $500 cash prize for the best “Student-Built Vacuum System” poster and presentation with judging taking place during the VT poster session – contact tim_gessert@nrel.gov for details. VTD will host an “Ask The Experts” booth where experienced vacuum experts will help answer all simple and perplexing vacuum technology issues. Finally, papers on use of vacuum technology in the astronomy, accelerator, neutron generator, and fusion communities are encouraged, along with new or emerging vacuum technologies not specifically solicited above.

  • VT1 Vacuum Measurement, Calibration and Primary Standards
    Michael Duncan, Oak Ridge National Laboratory, "Vacuum Calibration and Measurement"

  • VT2 Gas Dynamics, Transport, Flow, Leaks and Permeation
    Roberto Kersevan, ITER, "Numerical Methods for the Design of Vacuum Systems with Examples"

  • VT3 Optical and Mass Spectroscopy for Gas Analysis and Contamination Control
    Joseph Hodges, NIST, "Cavity Ring Down Spectroscopy for Trace Humidity Measurements"

  • VT4 Accelerators and Large Vacuum Systems
    H.-C. (Dick) Hseuh, Brookhaven National Laboratory, "Status of the National Synchrotron Light Source II Vacuum System Construction"

  • VT5+SS Surface Science for Accelerators

  • VT6+MN+NS+MS Vacuum Technology for the Next Generation Nanofabrication and Graphene Physics
    Joseph A. Stroscio, National Institute of Standards and Technology, "New UHV Low Temperature Scanning Probe Microscopy (SPM) Facility for the Study of Future Electronic Materials"

  • VT7 Vacuum Production, Pumping and Modeling
    Christian Day, Karlsruhe Institute of Technology, Germany, "Modeling and Simulation of the ITER Cryopumping Systems"

  • VT8 Outgassing and Desorption Phenomena including Water and Hydrogen in Vacuum Systems

  • VT9 Vacuum Technology Poster Session Including Student Poster Competition

  • EN17+VT Vacuum Technology for Green Solutions: Solar and Energy Storage
    Lindsey VanMannes, South Park Platinum, Inc., "The Use of Vacuum Technology to Improve Smelting and Refining of REE Ores and REE Resource Issues"


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