| Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) | |
| Thin Films | Wednesday Sessions |
| Session TF-WeM |
| Session: | Thin Film Synthesis and Characterization II |
| Presenter: | Young-Rae Cho, Pusan National University, Republic of Korea |
| Authors: | H. Park, Pusan National University D. Kim, Pusan National University I. Park, Pusan National University K. Bae, Pusan National University Y. Cho, Pusan National University, Republic of Korea |
| Correspondent: | Click to Email |
Sputtering is one of the most popular physical vapor deposition methods due to their versatility and reproducibility. Effect of organic substrate materials on electrical and mechanical properties of chrome (Cr) thin films was investigated. For the application of wearable or flexible electronic devices, the materials for substrate were selected from flexible organic materials such as leather, cloth (melton), paper and plant. The Cr films were deposited on the several different substrates by DC magnetron sputtering. The thickness of Cr films was varied from several tens to 500 nm. For the explanation of the electrical and mechanical properties, a sheet resistance and fatigue properties in cyclic stress of the samples were characterized. When we deposited Cr film over 400 nm in thickness, the sheet resistance of Cr film on smooth substrates (leather, A4 paper, melton) showed small values. However, the sheet resistance of Cr film on rough substrates (toilet paper, wool) showed very large values. Furthermore, we will try to prepare more wide range of organic substrates such as rubber and plant. Finally, the relationships between their physical properties of samples and the change of substrate shape will be discussed in detail.