| Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) | |
| Thin Films | Wednesday Sessions |
| Session TF-WeE |
| Session: | Thin Film Synthesis and Characterization III |
| Presenter: | Luis Garcia-Cerda, Research Center on Applied Chemistry, Mexico |
| Authors: | L.A. Garcia-Cerda, Research Center on Applied Chemistry, Mexico A. Puente, Research Center on Applied Chemistry, Mexico S. Galvez-Barboza, Center for Research and Advanced Studies of the National Polytechnic Institute L.A. Gonzalez, Center for Research and Advanced Studies of the National Polytechnic Institute |
| Correspondent: | Click to Email |
Mono and multilayer Ce-doped hafnium oxide thin films were deposited on silicon wafers and quartz by spin-coating technique using a solution prepared by solgel with hafnium chloride, cerium nitrate, citric acid and ethylene glycol as starting materials. Ce-doped HfO2 thin films with 1, 3 and 5 layers were annealed in air for 2 h at 500, 700 and 900 °C. The thin films were then characterized for structural, surface morphological and optical properties by means of X-ray diffraction (XRD), Atomic force microscopy (AFM), scanning electron microscopy (SEM) and optical absorption. X-ray diffraction analysis indicated that the cubic HfO2 films could be obtained by annealing at 500 °C. AFM and SEM images revealed well defined particles which are highly influenced by annealing temperatures.