| Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) | |
| Thin Films | Tuesday Sessions |
| Session TF-TuP |
| Session: | Thin Films Poster Session |
| Presenter: | Shin Kim, Sunchon National University, Republic of Korea |
| Authors: | S. Kim, Sunchon National University, Republic of Korea J.K. Kim, Sunchon National University, Republic of Korea J.M. Lee, Sunchon National University, Republic of Korea |
| Correspondent: | Click to Email |
Graphene has attracted a great attention by many researchers in terms of its interesting electrical, optical, and mechanical properties [1]. Furthermore, graphene has showed potential applications such as photovoltaics [2] and optical device [3] as well as transparent electrode[3]. This paper reports the deposition of graphene-embedded indium tin oxide (ITO). Specially, we will show a pattering of graphene which was embedded in ITO will enhance the electrical and optical properties of ITO. ITO films with a thickness of 50 nm were deposited on Corning glass substrate by direct current magnetron sputtering method using an ITO target at room temperature. The graphene samples employed in this work were grown on Cu foils by thermal chemical vapor deposition method. The graphene was transferred to ITO and then patterned with line shape (3um and 12um, respectively) using photoresist. After the dry-etching by using O2 plasma, ITO was deposited on the patterned graphene again. The sheet resistance and resistivity of the sample were recorded with each fabricating steps. The sheet resistance of ITO film with a thickness of 100 nm showed a 92 ohm/sq. ITO film that the sheet of graphene was embedded in showed a decreased resistance of about 80 ohm/sq. On the other hand, the sheet resistance of ITO films that patterned graphene embedded in was significantly decreased to as low as about 51 and 49 ohm/sq for 3 um and 12 um line shaped graphene embedded ITO, respectively.
In this presentation, we will report the detailed results and mechanism about the enhanced electrical properties of the graphene embedded ITO films.
[1] K. S. Novoselov, Science 306, 666-669 (2004).
[2] L. Gomez De Arco, ACS Nano 4, 2864-2873 (2010)
[3] F. Bonaccorso, Nat. Photonics 4, 612-622 (2010)