| Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) | |
| Biomaterial Interfaces | Tuesday Sessions |
| Session BI-TuP |
| Session: | Biomaterial Interfaces Poster Session |
| Presenter: | KwangWon Jung, DGIST, Korea, Republic of Korea |
| Authors: | K.W. Jung, DGIST, Korea, Republic of Korea K.S. Park, KMAC, Republic of Korea W.J. Min, KMAC H.J. Lim, DGIST, Korea S.J. Moon, DGIST, Korea D.W. Moon, DGIST, Korea, Republic of Korea |
| Correspondent: | Click to Email |
We have developed a TOF-MEIS system using 70~100 keV He+. A TOF-MEIS system was designed and constructed to minimize the ion beam damage effect by utilizing a pulsed ion beam with a pulse width < 1 ns and a TOF delay-line-detector with an 120 mm diameter and a time resolution of 180 ps. The TOF-MEIS is an useful tool for interfacial analysis of the composition and structure of nano and bio systems. Our recent applications are reported.
#1) UltraShallow Junction: As doped Si ultra shallow junctions were fabricated with various annealing conditions. We measured the compositional depth profile of 2 x 1015 atoms/cm2 As doped silicon (annealed/unannealed) by the random and channelling phenomenon in Si(100) lattice. The result clearly indicates that the As dopant profile depends on the annealing temperature and conditions. Monitoring of As activated/deactivated ratio in ultra shallow junction by TOF-MEIS will be beneficial to the manufacturing processes of semiconductor industry.
#2) NanoParticles: We measured the quantitative compositional profiling with single atomic layer resolution for 0.5~3 nm CdSe/ZnS QDs with a conjugated layer. We also investigated the effect with Polyaspartic Acid (pAsp) and Osteocalcin on the initial bone growth of calcium hydroxyl appatite on a carboxyl terminated surface. When pAsp is not added to the self-assembled monolayers of Ca 2mM with Phosphate 1.2 mM, the growth procedure of calcium hydroxyl appatite cannot be monitored due to its rapid growth. When pAsp is added to the SAMs, the initial grow stage of the Ca-P can be monitored so that the chemical composition and their nucleus size can be analyzed.
#3) Liquid interface: Using a graphene as a MEIS analysis window, the electric double layer structure of liquid interface was depth profiled with atomic layer depth resolution. The electric double layer of KI solution is reported with discussions on further studies.