| Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) | |
| Biomaterial Interfaces | Monday Sessions |
| Session BI-MoM |
| Session: | Nanobio Imaging |
| Presenter: | Nathan Havercroft, ION-TOF USA, Inc. |
| Authors: | R. Moellers, ION-TOF GmbH, Germany E. Niehuis, ION-TOF GmbH F. Kollmer, ION-TOF GmbH, Germany H. Arlinghaus, ION-TOF GmbH R. Dianoux, Nanoscan AG, Switzerland A. Scheidemann, Nanoscan AG N.J. Havercroft, ION-TOF USA, Inc. |
| Correspondent: | Click to Email |
Information on the chemical composition, physical properties and the three dimensional structure of materials and devices at the nanometer scale is of major importance in nanoscience and nanotechnology. Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) is an extremely sensitive surface imaging technique which provides elemental as well as comprehensive molecular information on all types of solid surfaces. Depth profiling of multilayers with high depth resolution as well as three-dimensional analysis is performed using additional low energy sputter beams. However, the topography of the initial sample surface as well as the subsequent evolution of the topography by sputtering cannot be identified by the technique and lead to distortions of the detected depth distribution. Scanning Force Microscopy (SFM) provides the required complementary information on the surface topography with a resolution on the nanometer level.
We have combined the techniques ToF-SIMS and SFM in one UHV instrument. The TOF-SIMS analysis is performed using a new bismuth liquid metal cluster ion gun that can achieve a lateral resolution of 20 nm [1]. For the sputtering of inorganic materials the instrument is equipped with low energy oxygen and cesium beams. Sputtering of organic materials without radiation damage is performed by using large gas clusters with low energy/atom allowing molecular depth profiles of organic multilayers with a depth resolution of 5 nm as well as 3D analysis of organic nanostructures [2]. The SFM unit is mounted on a 3-axis high precision flexure stage scanner with a small out-of-plane motion for very accurate information on the surface topography. The SFM can be operated in contact mode as well as in a variety of dynamic modes to provide additional valuable information about the physical properties of the sample. In this paper we will present first results illustrating the strength of combined in-situ TOF-SIMS / SFM measurements and the potential for a wide range of applications.
References
[1] F. Kollmer, W. Paul, M. Krehl and E,. Niehuis, Surf. Interface Anal. 45, 312 (2013)
[2] E. Niehuis, R. Moellers, D. Rading, H.-G. Cramer, R. Kersting, Surf. Interface Anal. 45, (2013) 158