New England Chapter and Section

Up to date information on the Chapter activities is available on the Chapter’s web page. 

Prior to the re-organization of Chapters at the beginning of 1971, there was both a New England Thin Film Chapter and a New England Section. 

The Thin Film Division Chapter was formed on June 1, 1966  with R.R. Addis, Jr.  as the Chair 

The New England Section was formed on 16 January, 1968 at a meeting attended by sixty-one people; the by-laws were approved  by the AVS Board on February 1, 1968 by Board and R M Oman was appointed as Chair.  

During this period, the Chairs were: 

Year

Section (or Chapter) Chair

Thin Film Chapter Chair

1966

 

R R Addis, Jr.

1967

 

K L Chopra

1968

Robert M Oman

M S Cohen

1969

Robert M Oman

M S Cohen

1970

Charles K Crawford

Ernest E Hubert

1971

Charles K Crawford

Ernest E Hubert

1972

Charles K Crawford

Benjamin H Vromen

1973

Melville B Nowak

Benjamin H Vromen

With the new AVS organizational structure in 1971, the New England Section became the New England Chapter within the New England RAG which covered Maine, Massachusetts, Rhode Island, New Hampshire, Vermont and part of Connecticut (Zips 060-064), The New England Chapter and the New England Thin Film Chapter combined as the New England Combined Chapter in 1974, and the name was changed to the New England Chapter in 2000. The Chairs were: 

1974

Wolfgang M Feist

1975

George R Wirtenson

1976

Alfredo Kniazzeh

1977

Joseph Malliakal

1978

John J Sullivan

1979

Charles K Crawford

1980

Marsbed H Hablanian

1981

Marsbed H Hablanian

1982

Charles K Crawford

1983

Thomas Shaughnessy

1984

Marsbed H Hablanian

1985

Thomas Shaughnessy

1986

D Dean Casey

1987

Richard P Jacobs

1988

Richard P Jacobs

1989

D Dean Casey

1990

Thomas Shaughnessy

1991

Michael Berry

1992

Jane L Harris

1993

Michael Berry

1994

Michael Berry

1995

Michael Berry

1996

Michael Berry

1997

Michael Berry

1998

Michael Berry

1999

Michael Berry

2000

Nigel Cotton

2001

Nigel Cotton

2002

Nigel Cotton

2003

Nigel Cotton

 Past Events 

The TFD Chapter held, on March 5, 1969, a General Meeting at M.I.T. Lincoln Laboratory; Dr. Robert J. Phelan, Jr., of M.I.T. Lincoln Laboratory spoke on "Optical Imaging and Storage with M.O.S. Structures" and Dr. L.V. Gregor of IBM Components Division, spoke on "Application of Silicon Nitride to FET Fabrication". At its next meeting on May 14,1969, held in the Auditorium of the Kennecott Copper Corp., Ledgemont Laboratory, Lexington, the speakers were Alvin M. Goodman of David Sarnoff Research Center, RCA Laboratories, on  "Transport of Photo-lnjected Carriers in Insulators", and D. Kahng of Bell Telephone Laboratories, on “Luminescence of Molecular Centers in Solids and Its Application to Thin Film Electroluminescence". 

The 1st Annual Symposium of the New England Section was held 24-25 April, 1969, at the Holiday Inn of Waltham, Mass. The theme for the symposium was Residual Gas analysis - mass spectrometry - pressure measuring instrumentation, and the invited speakers were, P.A. Redhead, W.S. Kreisman and Rocco S. Narcisi. An exhibition of Vacuum Equipment was held concurrently with the technical sessions. A 2- day course on “Vacuum Instrumentation & Technology” was given on 28-29 April  by John Kurtz; the registration fee was $30. The 1970: 2nd Annual Symposium & Exhibit was held at the same location in 1970; the symposium was co-sponsored by the Surface Science Division. John Kurtz again taught a course before the symposium. 

Eighty-six people attended the joint dinner meeting of the New England Chapter and the New England Thin Film Chapter, on January 24, 1972,  to hear Dr. Gottfried Wehner’s talk on" Recent Advances  in Sputtering" . “With characteristic good humor, Dr. Wehner began by noting that when the talk was arranged it was thought that certain advances would have been made, but. . . Then he proceeded with a most interesting and well balanced talk, including both fundamental and new developments in sputtering techniques.” 

In 2003, members in southern Connecticut were transferred to the New England Chapter when the Greater New York Chapter was dissolved.

 

The 1973 Annual Symposium of the Chapter on “Electron, Ion & Laser Beam Technology” was held in May,

 

The 1976 Annual Symposium & Vacuum Show, was held on June 16, 1977,  at the Holiday Inn Burlington, 

The 1979 Annual Symposium & Vacuum Show, was held on June 20-21, 1979, at the Holiday Inn, Woburn; the topic was “Wafer Fabrication’. The Basic Vacuum Technology course was given. 

In 1980, a 1-day symposium “Plasma 1980”, which was co-sponsored by the  Vacuum Technology &Thin Film Divisions, was held on June 16, 1980 at the Radisson Ferncroft, Danvers.  

The 1981 Annual Symposium, “State of the Art Techniques in Device Processing” was held June 15-16, 1981, in Danvers; the registration fee was $35. There was the annual exhibit and courses;, a 4-day “Basic Vacuum Technology”, for which the registration fee was $300 for members, a 2-day “Sputter Deposition and Ion Beam Processes”, with a $150 fee, and a 1 day “Overview of Thin-Film Deposition and Etching Processes”, with a $75 fee;  the non-member fees were $25 higher, which equaled the AVS membership fee. On April 6, 1981, a vacuum course for technicians, “Non-destructive operation of vacuum pumps and systems.” Had been given at the Hilton Merrimack, NH. 

The 1982 Annual Symposium was held June 14-15, at the Radisson Ferncroft, in  Danvers,  and the 4-day  “Basic Vacuum Technology” course was given. 

The 1983 Annual Symposium on “Microfabrication Technology 1983” was held 20-21 June, 1983 at the Radison Ferncroft, Danvers. On March 30, 1983  a technicians’ course on “Operation and Maintenance of Vacuum Pumps and Systems” was given at Bedford

The 1984 Annual Symposium on “Microfabrication Technology 1984” was held June 11-12, at the Sheraton Tara, in Nashua, NH.  The 4-day “Basic Vacuum Technology” and the 2-day “Vacuum Equipment-Computer Interface” courses were given, with a $440 registration fee, as well as a 1-day “Chemical Vapor Deposition” course with a  $240 fee.

The 1985 Annual Symposium on “Vacuum Processing Technology” was held June 10-11, 1985 at the, Sheraton Tara, Nashua, NH

At the 1986 Annual Symposium, held June 9-10 at the Sheraton, Nashua, the Vacuum Technology Division co-sponsored sessions on “Vacuum Technology for Microelectronics Processing” on June 11.  

Around this time, Mars Hablanian organized, with the help of John Plourde of IBM, an unusually large short course program in Burlington, Vermont, which was mostly attended by IBM students. The income from these courses gave the Chapter a solid financial base. 

The 1988 Annual Symposium on “Vacuum Processing” was held June 20-21, 1988 at the Marriott, Newton, In addition to the exhibit, about twenty courses were given; these are listed in the May, 1988 Newsletter. 

The 1989 Annual Symposium and Exhibit was held June 12-13, 1989 at the Newton-Marriott. A number of courses were again given; they are listed in the May/June 1989 Newsletter. 

The 1990 Annual Symposium and Exhibit, as well as courses, was held June 18-19, 1990 at the Marriott, Burlington, MA; the pre-registration fee was $40; registration at the door was $70. There were more than 80 companies represented in Equipment Exhibit and several courses were given. 

The 1991 Annual Symposium and Exhibit, as well as courses, was held June 10-12 at the Marriott, Burlington, MA; a “Plasma Processing” workshop was held on June 10, 1991. Again, more than 80 companies were represented in the Equipment Exhibit and several courses were given. 

The 1992 Annual Symposium and Exhibit, as well as courses, was held May 18-19 at the Marriott, Burlington, MA. A  5-day “Vacuum Technology” course and seven other courses were given. The AVS Recommended Practices Committee also met during the Symposium. 

The 1993 Annual Symposium and Exhibit, as well as courses, was held June 14-15, at the Marriott, Burlington, MA. A “New Products” session was held for the first time. 

The 1994 Annual Symposium and Exhibit, as well as courses, was held June 13-14 at the Marriott, Burlington, MA. The Applied Surface Science Division’s “Surface Analysis ’94” was held on the 15-17, at the same location and courses were given during the whole week. 

The 1995 Annual Symposium and Exhibit, as well as courses, was held June 12-13 at the Marriott, Burlington, MA; the pre-registration fee was still $40, as it was in 1990. There were sessions on “Flat Panel Displays” and “Vacuum Technology” as well as hands-on demonstrations of vacuum gauges, There were sixty-two companies in the Exhibit and fourteen courses were given.  

The 1996 Annual Symposium and Exhibit, as well as courses, was held June 17-18 at the Marriott, Burlington, MA. Sessions were held on “Biomaterials”, “Vacuum Technology”, “Semiconductors”,  and “Optical Coatings”. There were 59 companies in the Exhibit and 15 courses were given. 

The 1997 Annual Symposium and Exhibit, as well as courses, was held June 16-17 at the Marriott, Burlington, MA. There were 80 companies in the Exhibit and 13 courses were given. 

The 1998 Annual Symposium and Exhibit, as well as courses, was held June 12-13 at the Marriott, Burlington, MA; 18 courses were given. 

The 1999 Annual Symposium and Exhibit, as well as courses, was held June 14-15 at the Marriott, Burlington, MA 

The 2000 Annual Symposium and Exhibit, as well as courses, was held June 12-13 at the Marriott, Burlington, MA 

The 2001 Annual Symposium and Exhibit, as well as courses, was held June 11-12 at the Marriott, Burlington, MA 

The 2002 Annual Symposium and Exhibit, as well as courses, was held June 10-11 at the Marriott, Burlington, MA. There were 80 companies in the Exhibit and courses were given. However, the attendance at courses was significantly lower than in the past, due to the economic situation 

The 2003 Annual Symposium and Exhibit, as well as courses, was held June 9-10 at the Marriott, Burlington, MA.

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