Educational material available for purchase.( * No longer for sale.) Publications include books, monographs, and CDs. Except where noted, these were under the sponsorship of the Education Committee

A list of currently available publications is available on the web site.

1958
"Glossary of Terms"
AVS Standards Committee

1973
"Experimental Vacuum Science and Technology"
V.J. Harwood
Published by Marcel Dekker Inc.

1974
"Bibliography on Metallization Materials and Techniques for Silicon Devices: I"
J.L. Vossen, A.W. Stephens & G.L. Schnable
Thin Film Division

Additions to the bibliography were:
II in 1976, III in 1977, IV in 1978, V in 1979, VI in 1980, VII in 1981, VIII in 1982 and IX in 1983

1975
"Vacuum Hazards Manual"
AVS Standards Committee

1979
"Vacuum Hazards Manual," 2^nd Ed.
L.C. Beavis, V.J. Harwood, and M.T. Thomas
Monograph M-1

"Handbook of Vacuum Leak Detection"
N.G. Wilson and L.C. Beavis
Monograph M-2

"Partial Pressure Analyzers and Analysis"
M.J. Drinkwine and D. Lichtman
* Monograph M-3

1982
"Plasma Etching & Reactive Ion Etching"
J.W. Coburn
* Monograph M-4

1980
"Dictionary of Terms for Vacuum Science and Technology, Surface Science, Thin Film Technology and Electronic Materials"
M. Kaminsky and J.M. Lafferty, Eds.

1983
"Diffusion Pump Performance and Operation"
M. H. Hablanian
Monograph M-5

1987
*"Bibliography on Silicides- ASCII on IBM floppy disc"
Pramod Karulkar & John C Monson
"An Elementary Introduction to Vacuum Technique"
G. Lewin
Monograph M-8

1991
"An Introduction to the Fundamentals of Vacuum Technology"
H.G. Tompkins
Monograph M-6

"Pumps Used in Vacuum Technology"
H.G. Tompkins
2^nd Edition by H.G. Tompkins & Timothy A Gessert published in 2001
Monograph M-9

1992
"Primer on Capture, Sorb & Cryopumping"
I-1
"AVS Recommended Practices on Vacuum Measurements and Techniques," Vol. 1
Recommended Practices Committee (Robert E. Ellefson, Chair)
S-02

1993
"Excimer Laser Ablation and Etching"
James Brannon
Monograph M-10

Optical Diagnostic Techniques for Plasma Processing"
Gary S. Selwyn
Monograph M-11

1994
"Vacuum Gauging and Control
Harland G. Tomkins
Monograph M-12

"Electric Probes for Low-Temperature Plasmas"
David N. Ruzic
Monograph M-13

"Vacuum Science and Technology: Pioneers of the 20th Century"
P.A. Redhead, Ed.
Monograph M-14

"A History of the American Vacuum Society"
P.A. Redhead, Ed.
Monograph M-15

"Low Pressure Experiments & Modelling for High School Science Curricula"
Workbook WS-01 for the Science Educators Workshop; these are updated each year for the Workshop at the Symposium; i.e. WS-10 in 2003

1995
Hypercard "Fundamentals of Vacuum Technology"
Art Nelson

"Diffusion Pump Performance and Operation" 2^nd Edition
M.H. Hablanian
Monograph M-5

1996
Educational Outreach at the 42nd National Symposium of the American Vacuum Society"
Patricia A. Thiel & David E. Fowler
Monograph M-16A; M-16B with videotape

1997
"Plasma-enhanced Chemical Vapor Deposition"
Frank Janssen
Monograph M-17

1998
"Thin Film Deposition and Patterning"
Robert K. Waits
Monograph M-18

2000
"Partial Pressure Analyzers, Analysis and Applications"
Rudolf Schubert
Monograph M-19

"Introduction to Surface Science & Technology"
Y.W. Chung
CD-01

2001
"Plasma Etching in Microelectronics"
Nace Layadi, Simon J. Molloy, Avi Kornblit, John T.C. Lee, Thomas M. Wolf and Dale E. Ibbotson
Monograph M-20

"Pumps Used in Vacuum Technology" 2^nd Edition
H.G. Tompkins & Timothy A. Gessert
Monograph M-9

2002
"Vacuum Technology: A Beginning"
H.G. Tomkins
HB-1

2003
"Sputter Deposition"
W.D. Westwood
HB-2