Materials, Thin Films and Coating: Processing and Properties
Course |
Given |
No of days |
Adhesion Aspects of Thin Films |
1980- |
1 |
Adhesion of Polymeric and Metallic Thin Films |
1985- |
1 |
Application of Residual Gas Analysis in Semiconductor Processes |
1997 |
1 |
Applied Thin Film Optics (Optical Coatings) |
1975- |
1 |
Atomic Layer Deposition Fundamentals, Chemistry and Applications |
2002 |
1 |
Basics of Radio Frequency Technology |
1992 |
2 |
Characterization of Films and Coatings |
1986 |
1 |
Chemical Vapor Deposition |
1981- |
1 |
Chemical Vapor Deposition of Films for Microelectronics |
1982 |
1 |
Clean Room Technology |
1985- |
1 |
Cleaning and Contamination Control for PVD Processing |
|
|
Chemical Mechanical Planarization for Microelectronics Manufacturing |
1997 |
1 |
Computer-Aided Techniques for Optical Thin Films |
1987- |
1 |
Copper Interconnect Technology |
|
|
Deposition and Processing of High Tc Superconducting Thin Films |
1989 |
1 |
Deposition of Optical Coatings |
1998 |
1 |
Diagnostics for Plasma Technologies: Principles and Applications |
1993 |
1 |
Dielectrics for Microelectronics |
1987- |
1 |
Evaporation Methods |
1973- |
1 |
Fundamentals of Evaporation Methods |
1988 |
1 |
Fundamentals of Solid- and Gas- Source MBE |
1991 |
1 |
Fundamentals and Process Characterization of Ion Implantation |
1991 |
2 |
Fundamentals of Magnetic Materials and Magnetic Recording |
1988 |
1 |
Fundamental Mechanisms of Semiconductor Film Growth from the Vapor Phase (Evaporation, MBE, CVD, and Sputter Deposition) |
1991 |
1 |
Fundamentals of Semiconductor Characterization: Electrical and Optical Techniques |
1992 |
1 |
Fundamentals of Sputtering Technology |
1972-9 |
1 |
Fundamentals and Technology of Ion Plating |
1986 |
1 |
Growth and Characterization of Magnetic Thin Films for the Storage Industry |
1992 |
1 |
Handling Hazardous Materials in Semiconductor Processing |
1986-87 |
1 |
Hard Coatings by PVD Methods |
1989- |
1 |
High-Density Plasma Processing of Electronic Materials |
1995 |
1 |
IC Microdevice Fabrication |
1996 |
2 |
Ion Beam Techniques for Thin-Film Coating Deposition |
2000 |
1 |
Introduction to Contamination Control in Semiconductor Manufacturing |
1995 |
1 |
Introduction to Statistical Process Control for the Wafer Fab |
1998 |
1 |
Introduction to Thin-Film Phenomena |
1998 |
|
Introduction to Ion Sources |
1989- |
1 |
Introduction to Ion Beam Coating Deposition Technique |
2002 |
1 |
Introduction to Ion Sources: Principles and Technology |
1991 |
1 |
Ion Beam Applications to Thin Films |
1979 |
1 |
Ion Beam Techniques for Optical Coating Deposition |
1989- |
1 |
Ion Beam Techniques for Thin Film Coating Deposition |
2000 |
1 |
Laser Deposition and Etching |
1985 |
1 |
Magnetic Thin Films: Physics and Applications |
1995 |
1 |
Magnetic Materials and Applied Magnetism for the Information Storage Industry |
2000 |
1 |
Mechanical Properties of Thin Films |
1978 |
1 |
Metallurgical Coatings |
1981- |
1 |
Microcircuit Thin Films Technology |
1974- |
1 |
Micro-electromechanical Systems |
1995 |
1 |
Microfabrication Techniques for MEMS |
2000 |
1 |
Modern Semiconductor Device Modeling |
1999 |
|
Molecular Beam Epitaxy of Thin Films |
1989 |
1 |
Monitoring and Controlling Techniques for Thin Film Deposition Processes |
1981- |
1 |
Mysteries of IC Processing Revealed for the Nontechnical Person |
1996 |
1 |
Nanostructures: Fabrication and Characterization |
1994 |
1 |
Nucleation, Growth and Microstructural Evolution |
1997 |
1 |
Optical Coatings for Fiber Optic Communication |
2001 |
1 |
Optical Diagnostic Techniques for Plasma Processing |
1991 |
1 |
Overview of (VLSI and ULSI) IC Processing |
1985 1986- |
3 4 |
Overview of Thin Film and Coating Fabrication |
1988 |
1 |
Overview of Thin Film Processes |
1980- |
1 |
Overview of Thin Film Deposition and Etching Processes |
1981 |
1 |
Photolithography Process in IC production |
2000 |
1 |
Physical and Chemical Vapor Deposition |
2003 |
1 |
Physics and Technology of Semiconductor Contacts |
1988- |
2 |
Physics, Chemistry, and Mechanics of Adhesion |
1994 |
1 |
Plasma Enhanced Chemical Vapor Deposition: Fundamentals, Techniques and Applications |
1989- |
1 |
Plasma Etching and RIE |
1985- |
1 |
Plasma Etching |
1981- |
1 |
Plasma Etching and RIE: The Fundamentals |
1996 |
1 |
Plasma Etching and RIE: Fundamentals and Applications |
1997 |
2 |
Plasma-Enhanced Chemical Vapor Deposition |
1988- |
1 |
Plasma-Enhanced CVD Fundamentals, Techniques and Applications |
2003 |
1 |
Plasma Equipment Modelling and Simulation |
1996 |
1 |
Plasma and Ion Beam Diagnostics: Principles and Applications |
1998 |
1 |
Plasma Technologies in the Fabrication of Thin-Film Transistors for Liquid Crystal Displays |
1997 |
1 |
Practical Aspects of Substrate Cleaning and Thin-Film Adhesion |
1995 |
1 |
Practical Process design for Microlithography |
2000 |
1 |
Principles of High-Temperature Superconductivity |
1987-88 |
1 |
Principles of Photovoltaics: Physics and Applications |
1991 |
1 |
Principles of Semiconductor Thin Films |
1988- |
1 |
Process Technology for Packaging Applications |
1987- |
1 |
Production of Optical Coatings - Improvement of Yield and Process Control |
1999 |
1 |
Pulsed Laser Deposition for Thin-Film Growth |
1998 |
1 |
Rapid Thermal Annealing for Semiconductor Processing |
1986- |
1 |
Rapid Thermal Processing: Equipment, Technology, and process |
1994 |
1 |
Reactive Sputtering and Deposition |
1997 |
1 |
Semiconductor Contacts: Their Science, Fabrication and Characterization |
1991 |
2 |
Semiconductor Device Manufacturing Overview |
1999 |
1 |
Semiconductor Microlithography |
1991 |
1 |
Silicides for VLSI |
1986 |
1 |
Sputter Deposition and Ion Beam Processes |
1980-90 |
1 |
Sputter Deposition |
1991 |
2 |
Statistical Process Control in the Modern Wafer Fab |
1996 |
1 |
Structure-Property Relations in Thin Films |
1986- |
1 |
Surface Preparation for Thin Film Deposition |
1988- |
1 |
Surfaces, Biology, and Biomaterials |
1994 |
1 |
Technological Aspects of Metal/Semiconductor Contacts |
1994 |
1 |
Thin Film Deposition by Evaporation |
1999 |
1 |
Thin Film Deposition by Sputter Processes |
1997 |
1 |
Thin-Film Vapor Deposition and Patterning Techniques |
1995 |
2 |
Thin Films for Optical Recording Applications |
1991 |
1 |
Transparent Conducting Oxides: Their Science, Fabrication, Properties and Applications |
1991 |
1 |
UHV Practices in Semiconductor Processing |
1992 |
2 |
Understanding Thin Film Optics |
1989 |
1 |
Understanding Optical Coatings |
1997 |
1 |
Understanding Optical Coatings, Including Telecommunications Filters |
2000 |
1 |
Vacuum Evaporation/Deposition Technology |
1993 |
1 |