Course Year  Offered                         
84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 00 01
An Introduction to Ellipsometry                   X                
An Overview of Thin Film Deposition & Etching Processes   X   X   X X                      
Application of Residual Gas Analysis in Semiconductor Processes                             X      
Basic Microelectronic Processing                         X X        
Basic Vacuum Technology   X   X X X X X     X   X X X X X X
Clean Room Technology       X                            
CMP for Microelectronics Manufacturing                     X     X     X  
CVD For Microelectronics                   X       X   X X X
Depth Profiling                               X    
Dielectrics for Microelectronics               X         X     X    
Full Wafer Particle and Defect Detection, Review, Characterization                                 X X
Fundamentals and Process Characterization of Ion Implantation                         X          
High Density Plasma Processing of Microelectronic Materials                     X     X        
Mass Flow Controllers-Fundamentals, Techniques and Applications                   X   X     X      
Nucleation, Growth and Microstructure Evolution                       X     X      
Operation & Maintenance of Vacuum Pumping Systems                             X      
Optical Diagnostic Techniques for Plasma Processing                               X    
Partial Pressure Analyzers, Analysis and Applications                         X          
Plasma Enhanced CVD: Fundamentals, Techniques and Applications                       X     X   X  
Plasma Etching and RIE   X   X   X X X       X         X X
Practical Process Design for Microlithography                                 X  
Pumping Hazardous Gases   X   X   X X                      
Rapid Thermal Processing: Equipment Technology and Process                       X     X      
Reactive Sputtering and Deposition                               X    
Semiconductor Contacts-Their Science, Fabrication & Characterization                   X                
Sputter Deposition         X   X X     X       X     X
Surface Analysis: The Major Methods                     X              
Surface Analysis: The Major Methods                         X          
Surface Preparation for Thin Film Deposition                     X             X
Understanding and Modeling Contamination in Vacuum                   X                
Vacuum Leak Detection                             X      

 

 

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