Scope:
This meeting will provide an open forum for the presentation of new ideas in device fabrication, with an emphasis on the fundamental understanding related to the implementation and characterization of ultra-shallow junctions, advanced gate stack and contact engineering, strain engineering as well as on techniques for measurement and modeling of related parameters, considering the 1D, 2D and 3D-dimensional aspects of advanced devices. Devices based on Si and alternative substrate materials (Ge, III-V,..) for applications in logic and memory will be considered. Methods of failure analysis will be addressed as concerned with device manufacturability. Device designers, equipment manufacturers, characterization, failure analysis, modeling and TCAD engineers and researchers are particularly invited. The workshop consists of invited review papers, contributed papers, and focused topical discussions.

 

Schedule Now Available
         (click here)
 

Invited Speakers:

Invited speakers will focus on selected topics (see below).

• Dr. Michael Current

• Dr. Vio Ontalus (IBM)

• Prof. Lourdes Pelaz (University of Valladolid)

• Dr. Wilfried Vandervost (IMEC)

• Dr. Nobuyuki Ikarashi (NEC)

• Dr. Paul Ronsheim (IBM)

• Prof. Michael O. Thompson (Cornell University)

• Dr. Asen Asenov (University of Glasgow)

• Prof. Shi-Li Zhang (KTH-Royal Institute of Technology)

• Dr. Thomas Hoffmann (IMEC)

An evening panel discussion is planned on challenges to TCAD for accurate device modeling, including requirements from characterization, incorporation of stress effects, applicability of kinetic Monte-Carlo modeling to dopant diffusion and modeling

 

Abstract Submission Schedule:
Prospective authors must submit a one page abstract to della@avs.org by January 15, 2009. The single page abstracts should include: title, first author’s name and complete mailing address, including e-mail, names and affiliations of additional authors. The abstract should describe the work and summarize results; inclusion of result graphs is encouraged. In addition, please propose a session for your paper based on the list of topics above.  

Abstract submission via e-mail in attached Word or PDF format is highly encouraged. Authors of accepted papers will be notified by January 23, 2009, and will be required to submit a camera-ready paper for the proceedings volume in Word or PDF format by March 13, 2009. Click here for proceedings submission guidelines.

Manuscript Submission to JVST
Presented papers may also be submitted for review in AVS’ Journal of Vacuum Science & Technology B (JVST B). Manuscripts are due no later than April 29, 2009. Click here for manuscript guidelines.

 

Oral Presentation Guidelines:
20 minutes (3-5 minutes for question and answer).
A master computer will be provided for you to use during your presentation or you may also bring your own laptop. PowerPoint is the preferred presentation medium. Please remember that all authors are required to submit a camera-ready paper by March 13, 2009.

 

Poster Presentation Guidelines:
All posters should be set up for display by the time of the first poster session on Monday. Poster presenters will be provided with a blank poster board sitting on an easel. The easel will be arranged in the order that the posters are listed on the program. The poster dimensions are 30” wide x 40” tall.  Most authors choose to attach their paper directly to this poster, but you also may also bring your own poster with your paper pre-mounted as long as the poster does not exceed the 30” width—there will be many posters lined up together so we must limit the width. For the same reason, the long dimension of the poster needs to be the vertical one. There is room on a 30” x 40” poster board for eight or nine sheets of paper (each 8.5 x 11”) plus the title. Please remember that all authors are required to submit a camera-ready paper by March 13, 2009.

 

Sponsor/Exhibit Opportunities
If you are interested in sponsoring or exhibiting, please use this form or contact Della Miller, della@avs.org, 530-896-0477.

 

 

Venue:
The workshop will be held at the Embassy Suites located in the historic town of Napa, within minutes of world-class Wineries, Zagat Rated Restaurants and Championship Golf Courses.  Napa is 60 minutes (55 miles) from the San Francisco International Airport. Historic downtown Napa is home to COPIA: The American Center for Wine, Food & the Arts, the Napa Valley Opera House and many interesting Boutique Shops. The Napa Premium Outlets shopping complex is East of Hwy 29, 0.5 miles from the Hotel. All these activities are via the Downtown Trolley, which picks up across the street from the Hotel. 

A block of rooms has been reserved at a special rate of $179.00 single/double (plus tax)* at the Napa Embassy Suites, 1075 California Blvd., Napa, CA, 94559. This does include full Cooked-to-Order Breakfast and a two hour evening beverage reception, served daily from 5:30 p.m. – 7:30 p.m.

To make a reservation please visit http://embassysuites.hilton.com/en/es/groups/personalized/NAPVLES-AVS-20090425/index.jhtml or call 707-253-9540. The reservation deadline is March 26, 2009.

*Please note that the Saturday rate is $219.
 

Registration:
Workshop pre-registration will be $550 ($650 onsite). The registration fee includes breakfast, lunch, coffee breaks, and the conference reception as well as conference proceedings.

 

To register please click here.

 

 

INSIGHT-2009 Organizing Committee: 

Co-organizers :

• Michael Gribelyuk, IBM Systems and Technology Group, Hopewell Junction, NY 12533 USA, gribelyu@us.ibm.com

• Jerry Hunter, Virginia Tech, 1991 Kraft Drive (0905), Blacksburg, VA 24061 USA, hunterje@vt.edu

Publications Chair:
Jerry Hunter; Virginia Tech; 1991 Kraft Drive (0905), Blacksburg, VA 24061 USA hunterje@vt.edu                  

  

AVS Contacts:
Additional information about preparations for INSIGHT-2009 can be obtained from Della Miller, della@avs.org, 530-896-0477.  The latest information about INSIGHT-2009 will be accessible from the AVS website at www.insightworkshop.org.