Information AVS Della Miller 110 Yellowstone Dr., Suite 120 Chico, CA 95973 Phone: 530-896-0477 Fax: 530-896-0487 E-mail: della@avs.org

Call for Abstracts Deadline Extended to: June 18, 2010

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Abstracts of original work are requested on the following topics:

• CMP Integration
• Traditional Front End CMP Applications
• Traditional Back End CMP Applications
• Emerging and Non-Traditional CMP Applications
• Advanced CMP Consumables and Equipment
• CMP Modeling
• Cleans and Metrology

Submission Guidelines

• Submission of an abstract (a minimum of 200 words) is requested. Please indicate the preference of oral or poster presentation while submitting the abstract. The deadline for submitting abstract is on June 18, 2010. Presentation of accepted papers at the Symposium must be in English.
  
  Download Abstract Template
  Submit Online
   
• Camera-ready full-length papers, including figures and references (4-8 pages for oral presenters and 3-4 pages for poster presenters) should be sent electronically to della@avs.org upon the notice of accepted abstract. Camera-ready Papers are due on October 1, 2010
  
  Download Paper Template

Author Notification
All submitted abstracts will be reviewed by peers and the Technical Committee reserves the right to accept or reject papers for inclusion in the program. Notices of acceptance of abstract will be sent out to authors by August 6, 2010.