The 2019 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) will be held at the Monterey Marriott in Monterey, CA, April 2-4, 2019.

The FCMN will bring together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in-situ, and real-time control and monitoring. The conference will summarize major issues and provided critical reviews of important semiconductor techniques needed as the semiconductor industry moves to silicon nanoelectronics and beyond.

The conference consists of formal invited presentation sessions and poster sessions for contributed papers. The poster papers cover new developments in characterization and metrology especially at the nanoscale. The conference series began 1995 and is the 12th conference in the series.

2019 FCMN Brochure (PDF)
Sponsorship and Exhibitor Form (PDF)
Past Conferences Publications/Talks


"There were a total of 34 talks and 81 poster presentations that summarized major issues and provided critical reviews of crucial semiconductor developments and techniques needed as the industry evolves to silicon nanoelectronics and beyond."
-Alex Braun, "A Jaunt Through Nanotechnopolis," Semiconductor International.

"If you want to meet, greet, and learn from the world's experts in metrology, this is the place to be."
-Dan Hutcheson, The Chip Insider.

Program Committee and Chairs

Technical Contact:
David Seiler


Publication Contact:
Erik Secula

Program Co-Chairs:

  • David Seiler, NIST
  • Alain Diebold, CNSE, SUNY Polytechnic Institute
  • Zhiyong Ma, Intel
  • Paul van der Heide, IMEC

Program Committee:

  • Carols Beitia, CEA-Leti
  • Michael Current, Current Scientific
  • David Gundlach, NIST
  • Ajey Jacob, Global Foundries
  • Markus Kuhn, Intel
  • JJ Lee, TSMC
  • Alex Liddle, NIST
  • Ulrich Mantz, Zeiss
  • Bob McDonald, formerly of Intel (Treasurer)
  • Shinichi Ogawa,AIST
  • Erik Secula, NIST
  • Usha Varshney, NSF
  • Ehrenfried Zschech, Fraunhofer Institute for Ceramic Technologies and Systems

Conference Information and Office

Della Miller

110 Yellowstone Dr., Suite 120
Chico CA 95973

Phone: 530-896-0477
Fax: 530-896-0487



Platinum Sponsors

Gold Sponsors


Silver Sponsors