Manufacturing Science and Technology Group (MS) In the 21st century, manufacturing will continue to drive a sizeable percentage of the world’s gross national product and will provide the bridge for spanning fundamental sciences and commercial production of the high technology products. The MSTG is continuing to expand its efforts to include all areas of nano-manufacturing while maintaining its core competence in semiconductor manufacturing. As part of the 54th International Symposium of AVS, the focus for the Manufacturing Science and Technology Group will be to explore nano-manufacturing research areas across a broad spectrum of the high technology industries. The MSTG will co-sponsor a Topical Conference on Nano-manufacturing which will hold an all invited session covering the critical topic of “Beyond CMOS – new manufacturing approaches for “nano” information technology.” We will have two sessions, one on the enabling area of metrology and characterization of nano-manufacturing technology and one on the specific area of MEMS manufacturing. A poster session on all areas of nano-manufacturing (NM4) is also available for contributions.
 

MS1    Metrology and Characterization for Manufacturing

T. Kelly, Imago Scientific Instruments, "Laser Pulsed Atom Probe Characterization of Manufacturing Processes"

J. Notte, ALIS Corporation, "He Ion Microscopy for Semiconductor Manufacturing Characterization"

MS2+MN  MEMS Manufacturing

J.D. Evans, DARPA, "Divergence in MEMS and Semiconductor Manufacturing"

G. Winterton, Texas Instruments, "Manufacturing Challenges for Digital Micromirror Devices"